2

02l M14 x 1 17 17 28.4 14 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03l M14 x 1 19 17 30.7 16.3 15 13.3 13.1 10.4 4.5 35.9 8 1/8 KQ2E08-01l M16 x 1 17 19 24.1 6.7 17 14.2 26.1 18 6 30.5 1/4 KQ2E08-02l M16 x 1 17 19 28.4 11 17 14.2 26.1 18 6 33.1 3/8 KQ2E08-03l M16 x 1 19 19 31.7 14.3 17 14.2 26.1 18 6 37.4 Connection thread Rc 10 1/4 KQ2E10-02l M20 x 1 22 24 29.3 9.9 21 15.6 41.5 29.5 7.5 63.8

One-touch Fittings

-M5l 10 9.9 17.6 5.7 13.3 10 10 4.1 5.5 1/8 KQ2F06-01l 14 9.9 23.6 8.5 13.3 13.1 10.4 4.5 12.2 1/4 KQ2F06-02l 17 9.9 28.5 12.9 13.3 13.1 10.4 4.5 21.6 3/8 KQ2F06-03l 19 9.9 29.9 13.4 13.3 13.1 10.4 4.5 22.7 6 D M L1 L2 8 1/8 KQ2F08-01l 14 13 24.1 8.5 14.2 26.1 18 6 12.9 1/4 KQ2F08-02l 17 13 29 12.2 14.2 26.1 18 6 22.1 3/8 KQ2F08-03l 19 13 30.4 13.4 14.2 26.1 18 6 30.7 10 1/4 KQ2F10-02l 17

Stations: 8 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 02D (1/4, Bottom)

Stations: 8 Stations, AB Port: 1/4, Left, AB Thread: Rc, Control: None, PR Port: 1/4, Bottom, PR Thread: -, Silencer: -, Voltage: -

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

High-Precision Digital Pressure Switch

30 4.5 R1/4 10 30 Atmospheric vent port N02L 02L: 60.5 N02L: 61 NPT1/4 2 M5 x 0.8 Thread depth 5 Piping port 02L: R1/4 N02L: NPT1/4 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. * For tubing, please use the SMC

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

4 10 30 Atmospheric vent port N02L 02L: 60.5 N02L: 61 NPT1/4 2 M5 x 0.8 Thread depth 5 Piping port 02L: R1/4 N02L: NPT1/4 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. * For tubing, please use the SMC TU0425 (

2-Color Display Digital Flow Switch Series PFM

12 OUT2 OUT1 1/4" 10.3 10.2 DC () DC (+) 1 43 A (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x one-touch fitting 68 28 8 2 x 2.6 depth 5 910 2-Color Display Digital Flow Switch Series PFM7 Dimensions PFM7-(N)01/(N)02/F01 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x port size 18 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 2 x 3.4 28 8 2 x 2.6 depth 5 PFM7-(N)01L/(N)02L

5-Port Solenoid Valve

10 11 12 L1 84 100 116 132 148 164 180 196 212 228 244 L2 74 90 106 122 138 154 170 186 202 218 234 L3 110.5 135.5 148 160.5 173 198 210.5 223 248 260.5 273 L4 100 125 137.5 150 162.5 187.5 200 212.5 237.5 250 262.5 L5 13.5 18 16 14.5 12.5 17 15.5 13.5 18 16.5 14.5 228 SY3000/5000/7000 Series Type 50/Side Ported Plug-in Metal Base Dimensions: SY5000 Series D-sub Connector SS5Y5-50(R)F -02l

Stations: 8 Stations, AB Port: 02R (1/4, Right), AB Thread: Rc, Control: None, PR Port: 02B (1/4, Both Sides)

Stations: 8 Stations, AB Port: 1/4, Right, AB Thread: Rc, Control: None, PR Port: 1/4, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Series VS

interface (Note) 06 3/4 Size 2, 3 10 1 Size 3 TU1 Terminal Box Note: Please ask available protocol to SMC Conduit Port Thread (for terminal box only) Symbol Port Thread NIL Rc (PT) F G (PF) N NPT T NPTF Locations and sizes of port 4(A), 2(B) Symbol Port location Applicable ISO size 02 Side 1/4 Size 1 03 Side 3/8 Size 1, 2 04 Side 1/2 Size 1, 2, 3 06 Side 3/4 Size 2, 3 10 Side 1 Size 3 02B

PFxx-OMJ0005CN

12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L

Digital Flow Switch

. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02 -77No.PF-OMO0005-F PFMB7201S-F02L -78No.PF-OMO0005-F PFMB7201-C8 -79No.PF-OMO0005-F PFM7B7201

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

Digital Flow Switch (Remote type sensor unit)

/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N-1/2 -35No.PF-OMJ0016-J PFM5S-C/NL-1/2 -36No.PF-OMJ0016-J Panel

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

18 2 x 3.4 With connector cover 28 8 2 x 2.5 depth 5 PFMB7201-C8L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 1 43 12 (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x 8 One-touch fitting 68 28 8 2 x 2.5 depth 5 6 Series PFMB7 Dimensions PFMB7201-(N)02 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 Rc1/4 NPT1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-(N)02L

Digital Flow Switch (Integrated display type)

5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L

VS 8-2/VS 8-4

15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R [Option] How to Order Manifold 03 SD6Q VV8 01 N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol 01 02 03 01B 02B