Stations: 6 Stations, AB Port: 1/4, Left, AB Thread: Rc, Control: None, PR Port: 3/8, Bottom, PR Thread: -, Silencer: -, Voltage: -

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

High-Precision Digital Pressure Switch

30 4.5 R1/4 10 30 Atmospheric vent port N02L 02L: 60.5 N02L: 61 NPT1/4 2 M5 x 0.8 Thread depth 5 Piping port 02L: R1/4 N02L: NPT1/4 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. * For tubing, please use the SMC

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

4 10 30 Atmospheric vent port N02L 02L: 60.5 N02L: 61 NPT1/4 2 M5 x 0.8 Thread depth 5 Piping port 02L: R1/4 N02L: NPT1/4 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or dust. * For tubing, please use the SMC TU0425 (

2-Color Display Digital Flow Switch Series PFM

12 OUT2 OUT1 1/4" 10.3 10.2 DC () DC (+) 1 43 A (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x one-touch fitting 68 28 8 2 x 2.6 depth 5 910 2-Color Display Digital Flow Switch Series PFM7 Dimensions PFM7-(N)01/(N)02/F01 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x port size 18 Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8 2 x 3.4 28 8 2 x 2.6 depth 5 PFM7-(N)01L/(N)02L

5-Port Solenoid Valve

10 11 12 L1 84 100 116 132 148 164 180 196 212 228 244 L2 74 90 106 122 138 154 170 186 202 218 234 L3 110.5 135.5 148 160.5 173 198 210.5 223 248 260.5 273 L4 100 125 137.5 150 162.5 187.5 200 212.5 237.5 250 262.5 L5 13.5 18 16 14.5 12.5 17 15.5 13.5 18 16.5 14.5 228 SY3000/5000/7000 Series Type 50/Side Ported Plug-in Metal Base Dimensions: SY5000 Series D-sub Connector SS5Y5-50(R)F -02l

PFxx-OMJ0005CN

12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L

Digital Flow Switch

. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02 -77No.PF-OMO0005-F PFMB7201S-F02L -78No.PF-OMO0005-F PFMB7201-C8 -79No.PF-OMO0005-F PFM7B7201

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

Digital Flow Switch (Remote type sensor unit)

/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N-1/2 -35No.PF-OMJ0016-J PFM5S-C/NL-1/2 -36No.PF-OMJ0016-J Panel

VQ7-6/7-8

piping connection at ports 3 (R2) and 5 (R1). 2(B), 4(A) port piping connection Rc1/4 (right side) Rc3/8 (right side) Rc1/4 (left side) Rc3/8 (left side) Rc1/4 (bottom) Rc3/8 (bottom) One-touch fitting 6 (right side) One-touch fitting 8 (right side) One-touch fitting 10 (right side) One-touch fitting 6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

18 2 x 3.4 With connector cover 28 8 2 x 2.5 depth 5 PFMB7201-C8L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 1 43 12 (34.2) 3 1 IN 18 2 x 3.4 OUT IN 2 x 8 One-touch fitting 68 28 8 2 x 2.5 depth 5 6 Series PFMB7 Dimensions PFMB7201-(N)02 70 48 Width across flats 17 18 OUT2 OUT1 10.2 DC (+) DC () 1 43 IN OUT (34.2) 13 1 IN 3 2 x Port size 18 Rc1/4 NPT1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-(N)02L

Digital Flow Switch (Integrated display type)

5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L

Digital Pressure Switch

. -51No.PS-OMM0003-J Dimensions Z/ISE80(F)-02/N02/F02/C01/A2/B2/-C01: Rc1/8 -F02: G1/4 -A2: URJ1/4 -B2: TSJ1/4 -52No.PS-OMM0003-J Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-C01L: Rc1/8 -A2L: URJ1/4 -B2L: TSJ1/4 -53No.PS-OMM0003-J With bracket (Rear piping) ZS-24-A With bracket (Rear piping) ZS-24-D -54No.PS-OMM0003-J With bracket (Bottom piping) ZS-35-A -55No.PS-OMM0003-J Panel mount adapter (Rear

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Area: (800) 258-9200-www.stevenengineering.com 1/4 (Right side) 3/8 (Right side) 1/4 (Left side) 3/8 (Left side) 1/4 (Bottom) 3/8 (Bottom) 6 One-touch fitting (Right side) 8 One-touch fitting (Right side) 10 One-touch fitting (Right side) 6 One-touch fitting (Left side) 8 One-touch fitting (Left side) 10 One-touch fitting (Left side) Mixed 02R Blanking plate (Filter, Regulator) 03R VZS 02L

Table of Contents

Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L

VQ7-6/7-8

Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L

VS7-6

Bottom) 1 4 (Top) 1 4 (Both sides) 1 4 (Bottom) 3 8 (Top) 3 8 (Both sides) 3 8 One-touch fitting for 12 tube (Bottom) One-touch fitting for 12 tube (Top) (Right) 1 4 (Right) 3 8 (Left) 1 4 (Left) 3 8 (Bottom) 1 4 (Bottom) 3 8 1 1 Without Filter with auto-drain, regulator, air release valve Filter with auto-drain, regulator, pressure switch, air release valve 02D 02U 02B 03D 03U 03B 02R 03R 02L

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ITVH With digital pressure switch: IR12l0-01lEl-A ITVX 42 PVQ M10 x 1 25 31 7.5 VY1 Mounting hole M28 x 1.5 1.6 VBA VBAT 4.5 2 x 1/8 Port size 90.5 AP100 53.5 45.9 37.6 9.8 OUT IN 30 EXH 57 EXH 2 x 1/8 Pressure gauge port 35 783 IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR22l0-02l-A 12.5 48 2 Bracket 30 Mounting hole for hexagon panel nut 48 Bracket (Option) 30 Max. 4 Pressure