Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stations: 8 Stations, Port Size: N7 (1/4" One-touch Fitting), SI Unit: ZCNN (ControlNet, IP40, -COM), Number of Input Blocks: 0 (w/o Input Block)

Stations: 8 Stations, Port Size: 1/4" One-touch Fitting, SI Unit: ControlNet, IP40, -COM, Number of Input Blocks: w/o Input Block, Input Block: -, Input Block COM: -, Option 1: -, Option 2: -, US Option: -

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

Stations: 12 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 8 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 12 Stations, Port Size: C4 (ø4 One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 8 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 8 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 12 Stations, Port Size: N7 (ø1/4" One-touch Fitting), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option 1: D (DIN Rail), DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: N (Name Plate)

Stations: 05 Stations, Port Size: N7 (ø1/4"), Cable Length: 1 [Lead Wire (25 Cores) 1.5 m Lead Wire], Option 1: DN (DIN Rail Mount & Name Plate)

Stations: 05 Stations, Port Size: N7 (ø1/4"), Cable Length: 2 [Lead Wire (25 Cores) 3.0 m Lead Wire], Option 1: DN (DIN Rail Mount & Name Plate)