Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 3 (5.0m Cable 25 Pin), Option 1: D (DIN Rail Mounting), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 3 (5.0m Cable 25 Pin), Option 1: D (DIN Rail Mounting)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 3 (5.0m Cable 25 Pin), Option 1: N (Name Plate)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: D Side, Cable Length: 3 (5.0m Cable 25 Pin), Option 1: D0 (DIN Rail Mount w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: Name Plate, Option 2: Built-in Silencer, Direct Exhaust

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: None, Option 2: Built-in Silencer, Direct Exhaust

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: DIN Rail Mounting, Option 2: Built-in Silencer, Direct Exhaust

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: DIN Rail Mounting, Option 2: -

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: Name Plate, Option 2: -

Stations: 6 Stations, Port Size: 5/32" One-touch Fitting, Kit Name: D-sub Connector 25 Pin, Electrical Entry: D Side, Cable Length: 5.0m Cable 25 Pin, Option 1: DIN Rail Mount w/o DIN Rail, Option 2: Built-in Silencer, Direct Exhaust

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !