REA/REB

9 y q i !6 RE A B REC CX CY MQQ M RHC #2 !1 w t #6 #0 @2 u o r !3 !2 #5 !7 #1 #3 #4 e !8 @3 MK(2) @7 @8 @5 @6 RS Q G RS H A RZQ MI W S CEP1 N@4 @9 CE1 Component Parts CE2 No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Hard anodized Aluminum alloy Plate A q !

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !

Magnetically Coupled Rodless Cylinder

0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

Basic type / Direct mount type Series CY3B/CY3R

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0 i o q u y t r !2 w !1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Component Parts No.

AC Servo Motor Driver (Network card type ）

PE_ _] group : : : : : : 2240h VAR PE64 I32 rw 2281h VAR PF01 I32 rw [Pr. PF_ _] group : : : : : : 22C0 h VAR PF48 I32 rw 2401h VAR PL01 I32 rw [Pr. PL_ _] group : : : : : : 2430h VAR PL48 I32 rw 2481h VAR PT01 I32 rw [Pr. PT_ _] group : : : : : : 24D0 h VAR PT80 I32 rw 2581h VAR PN01 I32 rw [Pr.

REA/REB

B 4-Counter bore depth C MM thread depth M Hollow shaft for piping FA FB EB H S + Stroke HO TT T HP 4-J depth JK HI HG PA Slider Type/Slide Bearing REAS H 2-P HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT Slider Type/Ball Bushing REAL (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A High Precision Guide Type REAH N N Max.

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Sine Rodless Cylinder Series REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts Component Parts No. Description No.

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-28 29 5 Port Solenoid Valve Rubber Seal Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 SV SZ i SY 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i SYJ u SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

39

J K L M N O P Q Part no.

4/5 Port Solenoid Valve

For connector cable of M8 connector, refer to back page 10. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/exhaust center/pressure center 3 position closed center (B) 2 (A) 4 q t rw 5 (R1) 3 (R2

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety

HRX-OM-X027

AC200-230V 50/60Hz 1Ph 9.6A XQ001(MAR.2019) How to see the manufacturing code X Q 001 March 2019 X Q 001 REFRIGERANT R410A(HFC) 0.39kg Year Symbol Remarks Month Symbol Remarks Serial (GWP:2088) no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

HRX-OM-W038

RW Contact input signal 1 Sets contact input signal 1. RUN Contact input signal 1 type Sets input type of contact input signal 1.

HRX-OM-O021

RW Contact input signal 1 Sets contact input signal 1. RUN Contact input signal 1 type Sets input type of contact input signal 1.

NAAMS Standards Compliant

B) In the state of A), attach the upper hard stop and adjust shim q so that there is a space of about 0 mm between the upper hard stop and the hard stop. During this step, theoretically, there is no clamping force applied to the hard stop. C) In order to generate a clamping force from the state described in step B), insert an additional shim.

o

r J tt r'T q;i];".0* 3:Common exhaust for main and t l pilot valve + . t i ,{:| P oonr PE oofts ([he pilot exhaust is connedeq to the main exhaust For type 31,531,32, S32 manitold. M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.