gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less, TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD EXTENSION, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

VV5Q21-04C4M1-DW. VALVE. VV5Q* BUILT IN FITTING

VV5Q21 MANIFOLD. 1.81500 lb. J55.

inert gas, Operating pressure range: 0.1 - 0.7MPa (high pressure type 0.8MPa), Effective area mm 2 (Cv): 2 position metal seal 14.4 (0.8); 2 position rubber seal 16.2 (0.9) 3 position metal seal 12.6 (0.7); 3 position rubber seal 14.4 (0.8), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: metal seal 29 or less; rubber seal 34 or less TIE ROD, VV5Q21

Stations: 2 Stations, Port Size: ø4 One-touch Fitting, Kit Name: Terminal Box, Common: +COM, Option 1: -, Option 2: -, Option 3: -, Option 4: -, Option 5: -, CE Compliant: -

Stations: 2 Stations, Port Size: C4 (ø4 One-touch Fitting), Kit Name: T (Terminal Box), Common: 0 (+COM)

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.