Table of Contents

-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8 7.1 52.2 33.1 20.0 13 11.8 1/4" 13.2 11 1/4" 13.2 7.1 22.2 15-12-4 1 Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 How to Order Integration of a quick exhaust valve and an exhaust restrictor permits high-speed cylinder operation. 3 1 0 F

Table of Contents

AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

F

Connection thread Model D1 D2 L1 L2 *A M Nylon M5x0.8 KXL04-M5 8 22.5 24 11 4 10.4 13 22 16 2.5 3.5 18 KXL04-01S 12 23 25 16 18 KXL06-01S 25 28 20 6 14 12.8 15 24 17 4 8.6 14 KXL06-02S 28 29 26 18 KXL08-01S 29 32 28 14 KXL08-02S 32 33 34 8 17 15.2 17 27 18.5 6 21.6 38 KXL08-03S 33 34 43 14 KXL10-02S 38 42 69 38 KXL10-03S 39 42 77 10 22 18.5 23.5 32 21 7 30.5 95 12 KXL10-04S 42 43 38 KXL12

Compact Manifold Regulator Series ARM5

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Please be sure to fill in the blank referring to page 340. 199 42 Type 41 Type Series SY3000/5000/7000 Manifold Specifications SS5Y3-41(-Q) SS5Y3-42(-Q) SS5Y5-41(-Q) SS5Y5-42(-Q) SS5Y7-42(-Q) SY340 SY540 SY740 Single base/B mount Common SUP, Common EXH 2 to 20 stations Note 1) Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations A, B port Base Side Location Direction Porting

Vacuum Unit

For nozzle size 07 to 12, the value is common to the ejectors with valve and without valve. Max.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Approx. 21 69.3 42 12 Approx. 38.5 LECWith MR-BAT6V1SET 6 Mass: 1.4 [kg] Mounting screw Terminal Screw size: M5 Tightening torque: 3.24 [N m] CNP1 L1 L2 Approx. 6 Approx. 6 L3 Approx. 60 NP3 P4 CNP2 P+ Approx. 168 156 0.5 C D L11 L21 CNP3 3-M5 screw U V W PE Screw size: M4 Tightening torque: 1.2 [N m] Approx. 6 Approx. 12 42 0.3 Mounting hole process drawing 9 4 9.

Fluoropolymer Piping Equipment

16.5 1.8 LQ1H4G-Ml 1/2" 1/4" 42 24 21 48 28 6 6 LQ1H5A-Ml 3/4" 1/2" 55 29 26 62.5 39 10 10 1/2" 44 10 23 LQ1H42-Ml 10 7.4 LQ1H43-Ml 12 9.4 LQ1H44-Ml 10 7.4 LQ1H45-Ml 8 39.5 20 17 47.5 23 5.5 LQ1H46-Ml 6 3.6 LQ1H4F-Ml 3 34 15 14 42 16.5 1.8 LQ1H49-Ml 12 1/4" 42 24 21 48 28 6 6 LQ1H51-Ml 19 1/2" 55 29 26 62.5 39 10 10 44 LQ1H5B-Ml 1/2" 9 LQ1H5C-Ml 3/4" 23 15 LQ1H5D-Ml 1/2" 9 LQ1H5E-Ml 3/8"

AS

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

LEC-OM071xx

Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYU2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

High Purity Chemical Valve

Symbol 03 04 05 06 07 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Body class Note) Options can not be combined each other. 3, 1/8" Double acting 4 3/16" Material 2 Body type 6 1/4" Actuator section Applicable option Diaphragm PTFE Symbol Note Body A Stacking type for manifold End plate PPS 1 4 6 1/4" Nil PFA Hydrofluoric acid compatible PTFE F PVDF PFA 3 8 10 3/8" Ammonium hydroxide

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

Speed Controller with Indicator

, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4

7ND9071en

Class I, Division 2, Groups A, B, C, and D; T4/ T5/T6 Ex nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga Class I, Zone 2 AEx nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga ND_E2 CSA Std C22.2 No.25-1966, CSA Std C22.2 No.30-M1986, CAN/CSA-C22.2 No.94-M91, C22.2 No. 142-M1987, CAN/CSA C22.2 61010-1-04, CAN/CSAC22.2 No 60079-0-07, CAN/CSA-C22.2 No 60079-1-07, CAN/ CSA C22.2 No 60079-31

LEC-OM069xx

Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYM2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

SX

Double solenoid SX3240-5MO Single solenoid Common connector assembly SX100-42-4D SX3140-5MO Common connector assembly SX100-42-4S Common connector assembly (With common lead wire) SX100-40-4S SS5X3-41-04-C6 1 set SX3140-5MO 2 set SX3240-5MO 2 set SX100-40-4S 1 set (Single solenoid with lead wire for common) SX100-42-4S 1 set (Single solenoid) SX100-42-4D 2 set (Double solenoid, 3 position

Prevents Micro-Bubbles

Removal of drainage Flush drainage from filters regularly. 17-5-42

Compact Vacuum Unit Ejector/ Vacuum Pump System

For ejector selection, refer to pages from 877 to 898 in Best Pneumatics No.4, Vacuum Equipment Model Selection, on SMCs website (URL http://www.smcworld.com). 42 - Doc. no.

Piping: 42 (Base Mounted), Stations: 20 Stations, A, B Port: 01N (NPT1/8)