Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 5 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 03 (3/8)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 5 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 03 (3/8)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 5 Stations, Passage: 2 (P: Common, EA,EB: Common, Port A,B: Bottom), Port Size: 03 (3/8)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 5 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

VT307

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

JXCx-OMT0005CN

No.1 (2)(5)(10)(13) DRIVE No.

SFOD-OMT0005CN

(P.12) -80- 5(P.23) 9.1 (P.32) 3.4 (P.16) 10.(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

MHL2

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

PFxx-OMJ0005CN

(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7

IDX-OM-W038

10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2. IDX-OM-W038 . (17) (17) mm IDH6IDHA6 ( ( 1.25 6.5 Rc1/2 N.C N.O M3 (N.C:) (N.O:) 2 6.5 :1.25m m :M3 Rc1/2 31 15 (N.O) (N O 10 2 244 35 184 392 17 2 1 80 223 321 300 1 485 70 372 568 ( 10) ( 10) 240 2 15 1 306 270 63 IDH Series IDX-OM-W038 . 6.3 6.2.

JXCx-OMT0028CN

LEC (LECP6LECA6) 9 - 3 3.1 DC24V10% 200mA () 300mA () LEC (LECP6, LECA6) 12 *UL UL1310 Class2 EtherNet/IP EtherNet (IEEE802.3) 100BASE-TX 10/100Mbps () 100m(328ft) EtherNet/IP (/) 2048 (256byte)/2048 (256byte) IP DHCP ID7 0(Generic device) 154 LEC-GEN1 10 - RS485(Modbus ) 115.2k 230.4kbps (115.2kbps) (3m)(3m12 ) 39m 3m 3m 3m 3m 3m 0 40() 90%RH () -10 60() 90%RH () 2(0.5G

LECA6_C

(P.48) 5() ()() () 6 10 - 3. 3.1.

LECP6_C

(P.16) 9 - 4ON DC24V LED POWER ALARM LEDPWR LEDALM CN4 I/O 12.P.48 5() , () 6 10 - 3. 3.1.

SFOD-OMT0011CN

b) (Print) (1-1-1-2) Alarm save CSV 10 No.SFOD-OMT0011CN-A (1-1-1-3) Software Exit [] a) Software Exit b) (Y) (1-1-2) View (V) /StatusTeachingParameter Step DataAlarmTest Drive [] 4.1 (2) JOG 4.1 (3) 4.1 (4) 4.1 (5) 4.1 (6) , 4.1 (7) 11 No.SFOD-OMT0011CN-A (1-1-3) Window (W) All Close Position Init All Close Position Init (1-1-4) Help (H) Version LanguagePassword (1-1-4-