Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

A

20 BM1-02 25 BM1-32 32 BM1-04 40 BM1-05 50 BM1-06 63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

A_HEC-OM-J017

39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM

V

1.5 0.08 1.4 0.5 0.3 (6A) VX312(0/2/4)-01 2.2 0.16 2.8 0.3 0.2 VX313(0/2/4)-01 3 0.24 4.3 Water 1 0.6 VX311(0/2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-03 2.2

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 01 1 8 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 10-SY7000 02 02 03 1 4 2 position

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

SY

Conditions Conditions Body ported type SY3120 -C6 (Cv = 0.23) SY5120 -01 (Cv = 0.59) SY7120 -02 (Cv = 0.87) SY9120 -03 (Cv = 2.1) Base mounted type SY3140 -01 (Cv = 0.3) SY5140 -02 (Cv = 0.7) SY7140 -03 (Cv = 1.2) SY9140 -04 (Cv = 2.8) Series CJ2 Series CM2 Series MB/CA1 Series CS1 6 x 1m Series CJ2 Series CM2 Series MB/CA1 Series CS1 6 x 1m Tube bore x Length Speed controller Silencer Tube

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Table of Contents

Y300 Y400 Y500 Spacer (5) (6) 01 (02) AKM2000(01) 02 AKM4000(02) 03 AKM3000Check valve (6) IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 Pressure switch 01 (02) Y210(01) 02 Y410(02) 03 Y510Y310(02) 03 Y110-M5 (5) (6) T-interface Attachment 02 03 04 (6) VHS40-06 01 02 VHS20VHS30VHS4002 03 Residual pressure relief 3 port valve 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 (6) E400Piping adapter

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7 D-B5/B6 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-G5/K5 20 to 63 Mounting screws set made of stainless steel The following set of mounting screws made

VZ100/300/500

(Non-locking) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG (Lead wire length) VP G: 300 mm H: 600 mm S070 VQ VKF (PE port) VQZ (P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) Note 3) Float type auto drain Spacer Pressure switch Note 5) Note 4) Note 5) T-interface Y21001 (02) Y310(01) 02 Y310(01) 02 Y410(02) 03 Y510(02) 03 Note 5) 02 03 04 01 02 VHS302 03 VHS2000VHS302 03 VHS40003-port valve for residual pressure release 02 03 04 06 02 03 04 06 01 02 Y3401 02 01 02 03 E30002 03 04 E30002 03 04 E200E400E500-06 Note 5) Piping adapter Note 5) 01

Best Pneumatics Vol. 14

Y300 Y400 Y500 Spacer (5) (6) 01 (02) AKM2000(01) 02 AKM4000(02) 03 AKM3000Check valve (6) IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 Pressure switch 01 (02) Y210(01) 02 Y410(02) 03 Y510Y310(02) 03 Y110-M5 (5) (6) T-interface Attachment 02 03 04 (6) VHS40-06 01 02 VHS20VHS30VHS4002 03 Residual pressure relief 3 port valve 02 03 04 06 E500-06 02 03 04 E200E30001 02 03 (6) E400Piping adapter