0.4

one-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

A

5.5 20 25 39 28 3.2 35.8 42 16 28 47.6 35 93 114 25 ~300 19.5 22 45.5 10 14 2 12 12 31 5 8 M10x1.25 29 18 69 11 10 -0.025 -0.047 10 5.5 25 30 43 33 3.2 39.8 42 20 28 53 40 98 119 32 ~300 19.5 22 54 12 18 2 12 11 38 5.5 10 M10x1.25 36 18 71 10 12 -0.032 -0.059 10 6.6 32 35 54.5 40 4.5 49.4 48 22 28 67.7 40 101 125 40 ~300 27 30 63.5 16 25 2 13 12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Sensors 10-SS5Y3-20-05 1 set (Type 20, 5-station manifold base part no.) 10-SY313-5G-C6 2 sets (3 port valve, type NC part no.) 10-SY3120-5G-C6 1 set (5 port valve, single solenoid part no.) 10-SY3220-5G-C6 2 sets (5 port valve, double solenoid part no.)

SX

(One-touch fitting for 6) C6 (One-touch fitting for 6) A, B port C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides

Compact 5-Port Solenoid Valve

Side Ported Internal Pilot How to Order Manifolds JJ5SY 3 10 F 1 05 D C6 Made to Order (Refer to page 135 for details.)

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

V

The minimum quantity to order is 10 pieces.

SY

C6 C8 Note) Dimensions L1 to L4 of SS5Y5-45GUStations UC4 C6 C8 are the same as SS5Y5-45GUStations D. 2 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 260.5 248 235.5 210.5 198 185.5 160.5 148 135.5 250 237.5 225 200 187.5 175 150 137.5 125 233 217 201 185 169 153 137 121 105 13.5 15.5 17 12.5 14.5 16 11.5 13.5 15 C4 C6 C8 SS5Y5-45GUStations BStations n L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 260.5 285.5

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

Base Mounted Metal Seal/Rubber Seal Series VQ

C3, C4, C6, M5 C6 T1 U side D side Stations 3 2 1 Terminal no.

0.4

One-touch fitting R EXH EXH R B B B B B B B B P X X P 31.6 49 16 A A A A A A A A 7.5 12 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 1 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 101 n: Station (Maximum 16 stations) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 69 85

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

, Ripple (p-p) 10% or less (with power supply polarity protection) 40 mA or less NPN or PNP open collector: 2 outputs (selectable) 80 mA 28 V (with NPN output) 2 V or less (with load current of 80 mA) 2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000 and 2000 ms) 0 to 101 kPa 10 to 105 kPa Maximum load current Maximum applied voltage Residual voltage

Valve Single Unit

(One-touch fitting for 6) C6 (One-touch fitting for 6) A, B port C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides

Valve Single Unit

(One-touch fitting for 6) C6 (One-touch fitting for 6) A, B port C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) C6 (One-touch fitting for 6) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides

0.4

BDL (108.5) 10 4.6 10 34.3 47.1 101 74.5 35 5.5 28.1 12.7 ADDRESS No.

Series VQ Base Mounted Metal Seal/Rubber Seal

(For P, R ports) VVQ100051AC8 Port size Applicable tube 3.2 Applicable tube 4 Applicable tube 6 M5 thread C3 C4 C6 M5 Applicable tube 8 1.10-215 Note) 10 pcs. per one set. Note) 10 pcs. per one set.

SYJ300/500/700

(One-touch fitting for 6) A port Flow characteristics Flow characteristics Port size 12(PA) 23(AR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv 10-SS3YJ5-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25

Table of Contents

x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104 7.6000 x 102 1.0133 x 101 1.0133 1.0332 1.4706 x 10 1 9.8067 x 103 9.8067 x 105 1 x 104 9.6784 x 105 7.3556 x 102 1.4220 x 103 9.8067 x 106 9.8067 1 1.3332 x 102 1.3332 x 101 1.3332 x 103