Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

Air Cylinder

-X Bore size A B C D F GA H LB LC LH LT LX LY LZ NN NA NN WA WW S X Y Z 10 15 15 17 4 8 7.5 28 15 4.5 9 1.6 24 16.5 32 M4 x 0.7 21 M8 x 1.0 14.4 45 66 5 7 122 16 15 18.3 20 5 8 7.5 28 23 5.5 14 2.3 33 25 42 M5 x 0.8 21 M10 x 1.0 14.4 45 67 6 9 123 Technical Data 117 CJ2ZW Series Flange (F) Stroke CJ2ZWF 10 16 Z WA WA Mounting nut Rod end nut MM NN GA Piping port 2 x M5 x 0.8 GA WW NN MM

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-C6 Type 10-SS5YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

5-Port Solenoid Valve

(Example: When the P and E port entry is on the D side, the silencer exhaust port is on the U side.) * Refer to page 123 for the EX600 and y on page 131 for the EX250.

SYJ3000/5000/7000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

Table of Contents

30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 MX 20 MTS 25 MY 32 40 CY 50 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 20 340 331 2 52 43 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1.2-47 Series SYJ5000 42 Type Manifold: Side Ported/SS5YJ5-42Station -01,C6 Grommet (G), (H) C6 (Built-in One-touch fitting) Manual override Depress and turn to operate and lock override

Table of Contents

30.5 32.5 30 50 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 56.5 47.5 48.5 54.5 51 54 50 40 42 39.5 10-10-13 14 Series RZQ Mounting of Auto Switch Follow the procedures below to mount auto switches.

ZP

Form w 1 Material e Vacuum inlet r Connection B M5 x 0.8 thread 10 13 38 22 2.5 M5 x 0.8 5 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 10 13 B5 C2 Construction p. 117 38 22 2.5 N S U F GN GS Adapter Assembly p. 123 N4 N6 U4 U6 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 20 25 B8 ZP Y U B6 M6 x 1 6 42 24 3.5 M8 x 1.25 8 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 Dimensions

Electric Actuators

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

Tie-rod Type Hydraulic Cylinder

140 130 204 20 16 100 170 250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 406 CHA Series Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod Rod trunnion type: CHAU Z CHQ 2 x Rc P 4 x J Air release Cushion adjustment screw GB GB TT V T Width across flats G CHK MM R (max.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

4/5 Port Air Operated Valve Series SYJA3000

Gasket DXT199-21-11 P P Dust cap SY3000-42-1 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 Applicable manifold base Type SS5YJ7-21P Manifold gasket DXT199-21-11 Refer to page 1-5-80 prior to handling.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Unless otherwise indicated, dimensions are the same as L-type plug connector (L). [ ]: AC Max. 16 stations Dimensions 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L n L1 L2 L3 L4 L5 223 235.5 248 210.5 173 185.5 198 160.5 123 135.5 148 123 123 123 123 237.5 200 212.5 225 187.5 150 162.5 175 137.5 112.5 112.5 125 112.5 112.5 112.5 208 196 160 172 184 148 112 124 136 100 88 88 88 88 88 20 20 19.5 19

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

182 256 100 R2.5 42 140 130 204 20 16 100 170 250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 98 Series CHA Dimensions Front trunnion type: CHAU Z 2-Rc P Cushion adjustment screw 4-J Air release GB GB TT V T Width across flats G MM R (max.)