0.4

w e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4

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1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

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This can cause a loss of holding force and malfunction. AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

A

I L S C R A P E R X C 3 5 O P T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S

Compact Hydraulic Cylinder

W W D E d M a MA Q mC A K F NA NB mB H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d mB mC F G GA GB K E D S Q V W T P J MM M MA NA NB R 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106

Fieldbus System

Transmission System S (mm) VV5QC41 S Kit (Serial transmission kit: EX260) L2 (6.5) L1 39.5 (n1) x 25 Indicator light 65.5 25 Manual override 143 10 9 9 A B A A B A A B A B A B A A A A A A A 163 B B B B B SI unit n 1 2 3 4 5 6 7 Stations D side 8 U side 2 x Rc3/4 3 (R) port [Communication connector D-sub] 2 x Rc1/2 1 (P) port SMC SMC SMC SMC SMC SMC SMC SMC 101 95.5 77.5 76.7 76.7 15.7 15.7

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VF VFR Q> D 5 Q> D 5 VP7 Individual SUP block assembly Individual EXH block assembly U side D side U side D side VQC B A B A B A B A B A B A B A B A SQ VQ P P R R P R VQ4 [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold

Air Cylinder Series CM2

R1 ND MM ND MM R1 MM E1 ND NX1 A U1 R2 H Z E1 NX U1 L1 A A NX A1 (Min.) A1 U1 L1 Applicable bore size 20 25, 32 40 MM NDH10 R1 L1 NX E1 MM NX1 U1 A1 U1 A R2 Y Z A H NDH10 Part no.

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4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

4 3 position exhaust center 10-SY7000 02 02 03 1 4 S 5 VDC 5 3 position pressure center Note 1) : Enter a symbol for cable length.

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0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Magnetically Coupled Rodless Cylinder

Be careful excessive tightening may cause damage or malfunction of the shock absorber. q Surface B Hexagon socket head set screw Slide table Gasket (apply grease) Replacement shock absorber Guide Cylinder fixing bolts End cover Mounting hole (round hole) q Surface B q q Surface C Surface A Slider Actuator (cylinder) Mounting hole (Oval hole) Enlarged view of end cover q Surface A Enlarged

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

4/5 Port Solenoid Valve

For connector cable of M8 connector, refer to back page 10. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/exhaust center/pressure center 3 position closed center (B) 2 (A) 4 q t rw 5 (R1) 3 (R2

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly 11 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly 12 AXT625-3A-20 End plate (D) !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300