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o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

One-touch fittings 6 mm straight One-touch fittings 1/4 inch straight One-touch fittings 4 mm elbow One-touch fittings 6 mm elbow One-touch fittings 1/4 inch elbow 4 cores, for 2 outputs, 2 m Mounting screw (with 2 pcs. of M3 x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Ensure to avoid cutting off facility water or operating with very little water flow less than 5L/min. Such situation may cause that cooling and heating capacity deteriorate significantly and the life of the peltier device may be shortened. The maximum operating pressure is 0.5MPa.

PD11 *DI5-1 Input signal device selection 5L (CN1-7) 080Bh Refer to Any input signal can be assigned to the CN1-7 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select the input device of the CN17 pin.

Option Nil M ZS-24-A ZS-24-B ZS-24-D ZS-35-C Fixed SI unit Note 2) Bracket A With 2 mounting screws of each M3 x 5L, M4 x 5L Bracket B With 2 mounting screws M4 x 5L With unit switching function Note 1) P (Initial value psi) Bracket D With 2 mounting screws of each M3 x 5L, M4 x 5L Panel mount adapter (Piping: For 01/N01) Panel mount adapter (Piping: For W1/WF1/M5/C4/C6) Panel mount adapter

/min 5l/pulse Accumulated pulse flow rate exchange value (Pluse width: 50ms) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range

Note 4) An appropriate range is from 3 to 5L/min. To prevent damage to the radiating system, do not supply a flow over the maximum flow rate of 8L/min.

PD03] for settings. x x _ _ For manufacturer setting 08h PD11 *DI5L Input device selection 5L Any input device can be assigned to the CN1-19 pin. _ _ x x Position control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings. x x _ _ Speed control mode Device selection 03h Refer to table 5.10 in [Pr. PD03] for settings.

Calculation of diaphragm life Example 1) Discharge rate 5l/min, when operating 8h/D (for PAX1000) 5 0.021 238 (cycles/min) = = Cycles per minute Discharge rate Discharge per cycle 1 60 = x x 1 8 (daily operating time) Reference life cycles Cycles per minute Service life 1 60 = 1 8 50,000,000 238 x x 437 days = Example 2) Discharge rate 5l/min, when operating 8h/D (for PA3000 automatically

VQ2140-5L-C8-A Example) A port, Plug 2-4-64 Body Ported Series VQ0/1000/2000 Plug Lead Unit: Flip Type Manifold Option Double check block (Separated type) VQ2000-FPG- It is used on the outlet side piping.

[mm] Bar length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 4H/4L 4 6H/6L 6 8H/8L 8 AH/AL 10 5H/5L 3/16 7H/7L 1/4 9H/9L 5/16 BH/BL 3/8 : With piping on one side : With piping on both sides : Unrecommended piping Symbol High-voltage cable length [m] 1 1 2 2 3 3 The number of high-voltage cable holders differs depending on the high-voltage cable length.

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

To be arranged by the user. 6.3 Option L [Large capacity tank] 6.3.1 Option L [Large capacity tank] Large capacity tank provide you extra space volume for fluid collection of approximately 5L above high level.

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ VQD How to Order Valve Manifold Assembly (Example) U side VQZ2150-5L Stations VQZ2250-5L VQZ2350-5L D side VV5QZ25-05C6C1 set (C kit 5 stations manifold base) VVQZ2000-10A-51 set (Blanking plate assembly) VQZ2150-5L1 set (Single solenoid part no.)

Air operated type 2 Applicable series Symbol 03 Port size Rc 3/8 Pressure 1.0MPa 0 VBA2100/2200 VBA4100/4200 04 Rc 1/2 Related products Model Description Note VBA1110/1 VBA2100/2200 VBA4100/4200 VBA4200-04 AM250-02 AM450-04, 06 AM550-06, 10 Page 4.6-1 (Best Pneumatics No.4) Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more noise reduction Exhaust cleaner Air operated type VBAT05 (5l