Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 7 Stations, Voltage: 24 VDC, Electrical Entry: -, Blanking Plate: -, CE-compliant: -

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min (0.03 to 0.7SCFM) 5 to 45l/min (0.2 to 1.6SCFM) Average discharge pressure 0 to 0.6MPa (0 to 87psi) Pilot air consumption Maximum 200l/min (ANR) (7SCFM) Maximum 300l/min (ANR) (10.5 SCFM) 1m (3.3ft) (interior of pump dry) 2m (6.6ft) (interior of pump dry) Dry Suction lifting range Up to 6m

Process Pump Series PA3000/5000/PAX1000 Series PB1000

exhaust port Rc 1/4 AIR EXH FLUID IN Liquid contact areas ADC12 SCS14 SCS14 ADC12 Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min 5 to 45l/min Average discharge pressure 0 to 0.6MPa Pilot air consumption Maximum 200l/min (ANR) Maximum 300l/min (ANR) 1m (interior of pump dry) 2m (interior of pump dry) Dry Suction lifting range Up to 6m

PA3000/5000/PAX1000

exhaust port Rc 1/4 AIR EXH FLUID IN Liquid contact areas ADC12 SCS14 SCS14 ADC12 Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min 5 to 45l/min Average discharge pressure 0 to 0.6MPa Pilot air consumption Maximum 200l/min (ANR) Maximum 300l/min (ANR) 1m (interior of pump dry) 2m (interior of pump dry) Dry Suction lifting range Up to 6m

Available with straight and right angle connectors in lengths of 2m and 6m. Only for EX600-ED2 End Plate. ; Straight or Right Angle connector options ; Available lengths: 2m, 6m

Available with straight and right angle connectors in lengths of 2m and 6m. Only for EX600-ED2 End Plate.; Straight or Right Angle connector options; Available lengths: 2m, 6m

Available with straight and right angle connectors in lengths of 2m and 6m. Only for EX600-ED2 End Plate. ; Straight or Right Angle connector options ; Available lengths: 2m, 6m

2

Note 7) Mounting position: AF+T+AR V V V V V + Attachment Nt Nil Without attachment V V V V V V Mounting position: AF+AR+V V V V V V1 Note 8) Mounting position: V+AF+AR V V V V + d Pressure relief 3 port valve e Set pressure Note 9) Nil 0.05 to 0.7 MPa setting V V V V V 1 0.02 to 0.2 MPa setting V V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V 8

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Vacuum Unit

V V V V p. 9 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function Single unit V V V p. 10 Without valve V V p. 13 Pressure switch for vacuum V Ejector System V V V With valve V V p. 11 Pressure switch for vacuum V V V With valve Pressure switch for vacuum with energy saving function For Manifold V V V p. 12 Without valve

Table of Contents

Principal Parts Material Body C3604BD, Flame resistant PBT (UL-94 standard V-0) C3604BD (Thread portion) Stainless steel 304 Stainless steel 304, Flame resistant PBT (UL-94 standard V-0) POM Stud Chuck Guide Collet Release button Seal, O-ring Flame resistant PBT, Flame resistant CR (UL-94 standard V-0) Cover (Option) Flame resistant PBT (UL-94 standard V-0) NBR 15-3-1 2 Series KR Model Male

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Table of Contents

12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

EXxx-OMS0026CN

3PLC / / 0..10 V 0.00+10.45 V +0.05+10.50 V 0.00+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 0.00+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V +0.75+5.25 V 0..20 mA 0.00+20.90 mA +0.10+21.00 mA 0.00+21.00 mA 4..20 mA +3.00+20.90 mA +3.10+21.00 mA +3.00+21.00 mA /(E.O.

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS V V V V V V AS2002FS V V V V AS2052FS V V V V AS3002FS V V V V V V V AS4002FS V V V V 1 Use caution at the max. operating pressure when using soft nylon or polyurethane tubing. (Refer to the Web Catalog for details.)