Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

AC

AW+AL+V AF+AR+V AF+AFM+AR+V AW+AFM+V AC2001 to AC4001 AC2011 to AC4011 Residual pressure exhaust 3 port valve V AC2021 to AC4021 AC2031 to AC4031 Port size AC2041 to AC4041 01 02 03 04 1/8 1/4 3/8 1/2 Note 5) If indicating more than one symbol, place the desired symbols in alphabetical order.

0.55

None Common to all voltages SY100-82-1 With indicator light Rated voltage Voltage symbol Part no. 24 V 12 V 24 VDC 12 VDC SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 2.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Max. 3.5 Light Applicable heavy-duty cord 187.5 (3 position: 195) O.D. 6 to 8 (Y: 4.7 to 7) With light/surge voltage suppressor (DZ) Light Conduit terminal: Double VFS2210-T-01 02 Closed center VFS2310-T-01 02 Exhaust center VFS2410-T-01 02 Pressure center VFS2510-T-01 02 Applicable heavy-duty cord 187.5 (3 position: 195) O.D. 6 to 8 With light/surge voltage suppressor ( ): Y, YZ Light 1144

Proposals for Energy Saving

Symbol 04 06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

SYJ300/500/700

V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) DOZ is not available.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Modular Design with Uniform Body Style

V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V c Bowl*5 8 Metal bowl with level gauge V V V V C With bowl guard V *6 *6 *6 *6 6C With bowl guard (Nylon bowl) V *7 *7 *7 *7 + d Indicator Nil Without indicator V V V V V Semi-standard L With element service indicator*14 V V V*12 V V + t e Drain port*8 Nil With drain cock V V V V V J*9 Drain guide 1

EXxx-OMO0027

USINT 2 80x9:01 Channel 0 / User set lower limit value UINT 0 to 65535 80x9:02 Channel 1 / User set lower limit value 80xA:0 Slot x: Filter USINT 2 0=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 2 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ1000 VQZ2000 VQZ3000 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc(PT)1/8 Rc(PT)1/4 Mixture of port sizes Symbol C3 C4 C6 C8 C10 M5 01 02 CM v v v v v v Kit v v v C Connector v v v v (1) v v Note 1) When ordering port mixture and/or with port plug, suffix it in manifold specifications

Fieldbus system EtherCAT compatible SI Unit

Analogue input unit (EX600-AX#) (continued) Index Name (Meaning) Type Value 40xA:0 Range UNSIGNED8 Number of Channels 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.

/

-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220-03 VXE2320-03 VXE2230-03 VXE2330-03 VXE2240-03 VXE2340-03 VXE2250-03 VXE2350-03 VXE2260-03 VXE2360-03 VXE2260-04 VXE2360-04 1/8 (6A) 300 0.33 7.9 470 620 300 470 620 470 620 560 700 560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 3.0 0.61 15.0 4.5 1/4 (8A) 1.10 6 26.0 1.60 8 38.0

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

For lead wire length 2000 mm VFR2210-5MO-02 3 pcs. DXT170-80-4A-20 6 pcs. Nil Sockets (2 pcs.) only Without lead wire For 100 VAC For 200 V AC Other VAC Nil 6 10 15 20 25 30 300 600 1 2 3 Blue (2 pcs.) Red (2 pcs.)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol 02 Stations 2 stations Note Double wiring Note 1) A, B port size (Metric) 09 02 9 stations 2 stations P, E port Applicable series Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M Specified layout Note 2) 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Thread Manifold series Stations Rc (PT) 02 2 stations 3 SY3000 5 SY5000 G (PF) NPTF N NPT T ... ... 20 stations 20 7 SY7000 F A/B port size Symbol Port size 1/8 Applicable series 01 4 One-touch fitting C4 SY3000 6 One-touch fitting C6 1/4 02 6 One-touch fitting C6 8 One-touch fitting C8 SY5000 1/4 02 SY7000 10 One-touch fitting C10 Protective class class I (Mark: ).