42

*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

A

3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63 0~0.003 22 -0.5 ~ -03 1/2 40 20 16 RCS-05 18 28 56 1/2-20UNF 50

Modular Design with Uniform Body Style

By-pass port L-shaped piping adapter Air filter AF30-03-D 1 pc. Regulator AR30-03E1-D 1 pc. Cross spacer Y34-03-D 1 pc. IN Pressure relief 3-port valve VHS30-03-D 1 pc. Cross spacer By-pass port Combination example r Please contact your local sales representative for ordering procedures. Filter regulator Piping adapter E300-03-D 1 pc.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

V100

DXT060-51-13A 1 pc.

Air Fittings & Tubing

-03 15 35 48 22 41.5 29.5 10 21 24 KQ2E10-02 12.5 34.5 53 21 M20 X 1 22 KQ2E10-03 15 36.5 67 24 58.3 46.1 12 22 27 KQ2E12-03 14 37 92 23 M22 X 1 KQ2E12-04 18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 X 1.5 KQ2E16-04 18 44 132 Note1) ( ): Values for soft nylon.

VFR

-01T-081-03-AP5 1 set (Manifold base part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

03 DIN terminal (D, Y): 10-SY7 40(R)02 03 M8 connector (WO): 10-SY7 40(R)-WO02 03 3 4 5 3 4 5 3 4 5 3 4 5 D Y (Lead wire length) 154.2 [158.6] 50.6 [52.8] Applicable cable O.D. 3.5 to 7 Approx. 300 93 85.5 74.2 Max. 10 172.4 43.1 58.5 [65.5] 59.1 63 45.5 M8 x 1 (Lead wire length) Approx. 300 69.6 [76.6] Pg7 95.3 35.8 40.8 [43] 88.8 20.5 20.5 20.5 20.5 33 20.5 20.5 20.5 20.5 33 134.6 [139]

VQ5000

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

KR

26.5 22 30 33.5 24 20.5 15.5 26 27.5 14 26.1 8 18.0 18.5 17 Applicable tubing 17 41.5 10 29.5 21 3 8 KGH10-03 29 22.5 30 1 2 KGH10-04 27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 34.5 28.5 19 12 23.5 22 58.3 46.1 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 39.5 32 35.5 26.5 81 (81) 113 (96) 16 24 24 Connection thread Reference dimensions after R thread installation

SX

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

5

01 03 50 12 Part no.

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

04 03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

Table of Contents

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

VFS

04 03 04 q Description No.

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5