O.D. 6 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 4 5 6 6.5 7.5 8 9 1 4 41 49 50 63 62 93 91 37.5 17 12 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 x 1 11 6 11 17 21 30 35 45 13 8 M12 x 1 3 8 17 46.2 39.5 16.2 19 14 19 3 8 M15 x 1 16 10 17 48.8 41.5 18.8 19 17 22 Connection thread Applicable tubing Mounting plate thickness 4 mm or less 18 12 3 8 17 51.3 44.5 19.3 22 19
IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01
Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).
(Nl/min = 2061.2) Series CS1 SGP3/8 x 1m AS420-03 (Nl/min = 4034) AN400-04 (Nl/min = 4907.5) Base mounted type SY7140 -03 (Nl/min = 1177.8) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Nl/min = 4034) AN300-03 (Nl/min = 3602.1) SY9140 -04 (Nl/min = 2748.2) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed
-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350
11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO): 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 108.6 [113] Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 79 89 [93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176
3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-04 11 22 42 3/8-24UNF 40 0~0.003 22 -0.5 ~ -03 1/2 50.6 40 20 16 RCD-05 44 20 28 56 1/2-20UNF 50, 63 0~0.003 22 -0.5 ~ -03 1/2 40 20 16 RCS-05 18 28 56 1/2-20UNF 50
v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).
11 11 11 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to back page 11 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43
terminal: VF5120-DVF5120-Y02 03 02 03 Manual override (Non-locking) Manual override (Non-locking) (Mounting hole for manifold) (Mounting hole for manifold) Applicable cable O.D.
*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).
"Sl module must be orderd separately "11 11 stations Includes 1 station 10 mount Sl unit.
IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01
Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.
21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL
VHS3003 VHS2002 VHS30-03 VHS4002 Note 6) 01 02 02 03 06 Piping adapter E100-M5 E200-02 E300-03 E300-03 E400-04 E500-06 E60010 E60006 E60006 10 10 03 04 04 06 Note 6) 02 01 02 02 Pressure switch 03 IS1000E-20 02 IS1000E-30 03 IS1000E-30 03 IS1000E-40 04 with piping adapter 03 04 04 06 Note 6) 01 01 01 02 03 Y14-M5 Cross interface Y24-02 Y34-02 Y34-02 Y44-03 Y54-04 Note 1) in part numbers
VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.
) 03 Y510-(02) 03 Y61003 (04) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02