XL

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

High Vacuum Angle Valve, XL Series

Flange type Electrical entry Symbol Type Applicable flange size Nil 16, 25, 40, 50, 63, 80 63, 80 Grommet (lead wire length 300mm) Grommet (lead wire length 600mm) L type plug connector M type plug connector G H L M D KF(NW) K(DN) Solenoid valve direction Left flange surface K L Solenoid valve action Rear flange surface Right flange surface Nil 2 position single 2 position double M W Note

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

XM, XY

Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

Metal Seal/Rubber Seal Series VQ Body Ported

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge voltage suppressor, and the voltage is 24 VDC. kit (Serial transmission unit) kit (Lead wire cable) The dust-protected type SI unit is applicable

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

EX120/121/122

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)

0.4

m is number of I/O Units.

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum

1

m is number of I/O Units.

5 Port Solenoid Valve Series VQZ1000/2000/3000

M-type plug connector (M) The dashed lines indicate the DIN rail mounting [-D].

XMD/XYD Series

Opening the valve (valve M) for main pumping When the air pressure is applied to the pilot port M, the valve will release from the body seat and fully open. It operates even when air pressure is not applied to the pilot port S. 5-5.

This is a legacy product, and replaced byVO307-5DZ1-Q

This is a legacy product, and replaced byVT307-5DZ1-02-Q, VT3 BASE MT 1/4, VALVE, VT3/VO3 SOL VALVE 3-PORT, PA, VT3 BASE MT 1/4, 0.41834 lb

This is a legacy product, and replaced byVT307-5DZ1-01-F

This is a legacy product, and replaced byVT307-5DZ1-01F

This is a legacy product, and replaced byVT307-5DZ1-01F-Q

This is a legacy product, and replaced byVT307-5DZ1-01N, VALVE, SOL, VALVE, VT3/VO3 SOL VALVE 3-PORT, NA, VT3 BASE MT 1/8, .39600 lb

This is a legacy product, and replaced byVF3130-5DZ1-02T