Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual)

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S

CATALOG

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E137, E138, N238, N239 2.31 SOLENOID VALVES SERIES VQ1000 BODY PORTED TYPE PLUG LEAD UNIT/FLIP TYPE SERIES VQ1000 H O W T O O R D E R M A N I F O L D VV5Q 1 08 4 S1 F D K I T S E R I E S VQ1000 4 Plug in unit/flip type T Y P E O F M A N I F O L D DIN R A I L/O P T I O N Symbol Option None (

V

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E137, E138, N238, N239 2.31 SOLENOID VALVES SERIES VQ1000 BODY PORTED TYPE PLUG LEAD UNIT/FLIP TYPE SERIES VQ1000 H O W T O O R D E R M A N I F O L D VV5Q 1 08 4 S1 F D K I T S E R I E S VQ1000 4 Plug in unit/flip type T Y P E O F M A N I F O L D DIN R A I L/O P T I O N Symbol Option None (

CKZ2N

D-DN This catalog is printed on recycled paper with concern for the global environment.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Direct Solenoid

|y-4"C. compbla wllh coll. 120i80 240t60 JEOAO aola{)g 401A.r0 NXTO1012 12 C&llYe ac|.w i lock l|.lh.r XTOlG2i 't3 thock pd NXTO1010 ta NXrOl t3 DIRECTIOI{AL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 3115,3125 NVS 3135, 3145 NVS 3135 NVS 3145 DIMENSIONS Valve Slzs A B c D E F G H J K M N P NVS 3135 5.98 (152) 2.56 (65) 2.01 (s1) 0.75 (19) 0.35 (s) 1.38 (35) 1.77 {45) 2.56 (65) 2.52 (64)

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Model: 5 (VP500), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: None

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with Soft Start Function

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with Soft Start Function

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single)

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with Soft Start Function

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: None, Thread (external pilot

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with Soft Start Function

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: M (M12 connector, made by OMRON), Flow Direction: R (right to left), No. of Residual Pressure Exhaust Valves: S (Single)

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: M (M12 connector, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S (with Soft Start

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: M (M12 connector, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with Soft Start