Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: None, Thread (external pilot

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: Nil (G1/2, made by OMRON), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: S (Single), Soft Start-up: S (with Soft Start Function

NCQ2/CQ2

D-A7wH D-A80H D-F7w D-J79 D-A9wV D-A7w D-A80 D-A73C D-A80C D-F7wW D-J79W D-F7BAL D-F79F D-F7NTL D-M9wWV D-M9wAVL D-F7wWV D-F7BAVL D-M9wV D-F7wV D-J79C Number of auto switches D-A9w D-A79W D-P3DWw With 1 pc. 5 5 10 10 15 15 20 15 With 2 pcs. 5 10 10 15 15 20 20 15 The applicable auto switches for the CDQ2 R/ V (water resistant) are the D-M9 A(V)L type.

Compact Cylinder

Applicable Cylinder Series: CDQP2, CDQP2lll-lS/-lT (Axial piping) (mm) D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F7BAL D-F79F D-F7NTL U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 64.5 74.5 Auto switch model D-A9l D-A9lV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lAL D-M9lAVL D-F7lV D-F7lWV D-F7BAVL D-A7l D-A80 D-A73C D-A80C D-J79C D-A79W D-P4DWL Bore size U 26 29 31 34 38 41.5 47.5 54 64 74 U 23 26 28 31 35

High Vacuum Angle Valve

D-G

JXCx-OMT0023

H T E (Note)L d W D T Max.

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

Metal Seal/Rubber Seal Series VQ Body Ported

numbered from the D side.

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10-D CDRBU2W15, 20, 30-D (Figures below show size 20 actuators.) 2 x M3 x 0.5 through 2 x 3.5 through 2 x 3.5 through 17 2 x S2 2 x S1 10.5 B port A port 0.5 9 2 x S1 2 x S1 3 2 x M5 x 0.8 (Connection port) 10.5 2 x 3.5 through A port B port 2 x R D-90 ,D-S99 D-90A ,D-T99 3 D-97 D-93A (3m) 0.5m 18.5 2 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

Electric Actuator

(2.5 to 40 mA). # The optimum operating range can be D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry determined by the color of the light.

Base Mounted Metal Seal/Rubber Seal Series VQ

starting from station one on the D side.

SV

side D D D D D D SS5V1-16S3AD-06B-C61 set (manifold part no.)

LEC-OM071xx

i s p l a y a n d SigmaWin+TM 2.

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

CRBU

, D-R80, D-T79.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.