Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

JXCx-OMT0023

) P, S, T Internal speed limit 1 T PD09 *DI4-1 Input signal device selection 4L (CN1-6) P, S, T PC07 SC2 Internal speed command 2 S PD10 *DI4-2 Input signal device selection 4H (CN1-6) P, S, T Internal speed limit 2 T PD11 *DI5-1 Input signal device selection 5L (CN1-7) P, S, T PC08 SC3 Internal speed command 3 S PD12 *DI5-2 Input signal device selection 5H (CN1-7) P, S, T Internal speed

High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

Made to Order

200 223 393 241 411 250 283 484.5 300 293 519.5 ZZ + Stroke (A + B) S + Stroke (A + B) Atmospheric release port CS2 series Stroke A A port Stroke B B port C port (mm) Bore size (mm) S ZZ 125 197 334 140 197 334 160 213 363.5 S + Stroke (A + B) ZZ + Stroke (A + B) CQS series (mm) Stroke Both of S1, S2 Bore size (mm) B1 B2 L A 12 (27) (52.5) (22) 3.5 42.5 17 22 S1 S2 5 to 30 16 (27) (52.5

Aluminum High Vacuum Angle Valve

The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount.

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

1

Series CBA2 B port C port A port Atmospheric release port NCM Bore size (mm) ZZ S Q NCA B2 + Stroke S2 B1 + Stroke S1 40 230 168 53 A + Stroke (S1 + S2) 50 249 180 59 D63 268 196 61 80 320 232 73 -X Stroke B Stroke A 100 341 252 79 S + Stroke (A + B) Series MB The above diagram shows head side lock type and manual releasing nonlock type.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

Vacuum Module Series ZX

B Vacuum Pressure Switch Unit/Adsorption Confirmation Switch: ZSP1Adsorption Confirmation Switch Specifications Small diameter nozzle/0.3 to 1.2 ZSP1-S ZSP1-B Unit no.

Electric Actuator

Motor type LEYGlMlA Step motor (Servo/24 VDC) Servo motor (24 VDC) 200 mm/s 200 mm/s LEYGlMlB 125 mm/s 200 mm/s LEYGlMlC 75 mm/s 125 mm/s For the specifications below, operate the system at the load mass shown in the graph x 80%.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

LEC-OM071xx

Station Address MECHATROLINK-III Communication Baud Rate 100 Mpbs Transmission Cycle 125 s, 250 s, 500 s, 750 s, and 1.0 ms to 4.0 ms (increments of 0.5 ms) Number of Transmission Bytes 16, 32, or 48 bytes per station Use the DIP switch S3 to select the number of words.

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Electric Actuator

S1 S2 Without driver LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 ) ) ) ) ) ) ) ) ) ) ) ) ) ) When the driver type is selected, the cable is included.

CRBU

CRBU2W10-SE CRBU2W10-S A port B port For unit mounting A port B port For unit mounting (mm) (Depth) Q2 Model A B C D E (g6) F (h9) G H J K L M N P Q1 R S1 S2 T U V W X CRBU2W10-S CRBU2W10-SE CRBU2W15-S CRBU2W15-SE CRBU2W20-S CRBU2W20-SE CRBU2W30-S CRBU2W30-SE M3 (4) M5 x 0.8 M3 x 0.5 M5 x 0.8 M3 x 0.5 10.5 8.5 10.5 11 11.5 14 12 15.5

Step Motor Controller

to the control panel,s protective earth (PE).

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.