5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

_r __ _ M ;; Interface Regulator NARBF2000-00-P-1 (Plug-in type) NARBF2000-00-P-2 (Non plug-in type) Interface Speed Control VVFS2000-20A-1 (Plug-In type) VVFS2DOO-20A-2 (Non plug-in type) 0:,0 ~ *ga 5. ~ Interface speed control / Q[Q ,-,.28 (32.5>', ' w ---i';; ,0.89 1<22.5l1 I I~ : .~~ U N i ~ -!

Air Slide Table

ZZ MXQ 20A-mm2 With end lock (20) Q Pilot port 2 x M5 x 0.8 Dimensions [mm] 5 J 3 7 Model J Q MXQ20A-10Zm2 91.5 MXQ20A-20Zm2 MXQ20A-30Zm2 101.5 MXQ20A-40Zm2 111.5 MXQ20A-50Zm2 127.5 MXQ20A-75Zm2 161.5 MXQ20A-100Zm2 234.5 38 0.5 9.5 3 72 16.2 10 53 61 MXQ20A-125Zm2 259.5 MXQ20A-150Zm2 284.5 3 MXQ20A-10Z2 7 5 J * Dimensions other than those listed above are the same as those for the standard

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-9A(-Q) SY5000 SY5000-26-20A(-Q) SY7000 SY7000-26-22A(-Q) SY9000 SY9000-26-2A(-Q) Series Gasket assembly part no. SY3000-GS-2 SY5000-GS-2(-Q) SY7000-GS-2(-Q) Series Assembly part no.

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump Weight (dry state) 333 lbs (151 Kg) 339 lbs (154 kg) Note 4) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC Note 5) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid temperature

LEC-OM071xx

Name Mid-execution Automatic Parameter changes changes Pn401 Torque Reference Filter Time Constant No Yes Pn408 Torque Related Function Switch Yes Yes Pn409 1st Notch Filter Frequency No Yes Pn40A 1st Notch Filter Q Value No No Pn40C 2nd Notch Filter Frequency No No Pn40D 2nd Notch Filter Q Value No No 6-29 7.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

Pilot Operated

L Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5

Coolant Valve

623 A VNC Series How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 1 Q SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60

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Base material: Aluminum Fluid: Air VXE2 VXED2 VXEZ2 Common SUP Individual SUP u u w w t e t e y r q y r o o q y i y i IN OUT OUT port IN port Base material: Brass (C37), Stainless steel Fluid: Water/Oil Common SUP u w t e y r o q y OUT i IN port Component Parts Material No.

Pulse Valve

IN side IN side IN side 12 ATEX Compliant Pulse Valve Valve for Dust Collector 55-JSXFA Series RoHS II 2 G Ex h IIB T6 Gb II 2 D Ex h IIIB T72C Db 40C Ta +60C How to Order JSXFA B 06 R E 1 55 Compression fitting type Direct piping type e r t y w q w IN/OUT port size ATEX category 2 q Piping e Thread type E Compression fitting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 VQ SY3000 SY3000-39-20A SY5000 SY5000-39-1A-Q SY7000 SY7000-39-1A-Q SY3000 SY3000-38-20A SY5000 SY5000-38-1A-Q SY7000 SY7000-38-1A-Q VQ4 1/4 SY9000 SY9000-39-1A-Q 1/4 SY9000 SY9000-38-1A-Q Series Round head combination screw VQ5 Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"