Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: B (FPM seal), Thread: Rc(PT), Port Size: 10A (3/8), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, CE Compliant: Q (CE Compliant)

Size: 1 [ø7], Valve Type: 4 [NC (Operating Pressure 1MPa)], Sealant: FPM seal, Thread: Rc(PT), Port Size: 3/8, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: None, CE Compliant: CE Compliant

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

0.4

w r e q w EX510 SQ2130 SQ2131 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) F kit Double: SQ2231D Double: SQ2230D r e q w r w e q P SQ2230D SQ2231D 2 (B) (A) 4 2 (B) (A) 4 kit (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) J kit 3 position:SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 r e q w r e q w T kit L kit SQ2331 SQ2431 SQ2531 SQ2330 SQ2430 SQ2530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Table of Contents

ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Table of Contents

2 VFS6000-8A !

Series VCL

terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57

Series VCS

valve Class Orifice size Model Material Port size Note 1) Body Seal 2 3 4 5 7 10 1/8 ( 6A) 2 1/4 ( 8A) 1/4 ( 8A) VCS (for steam) 2 port solenoid valve 3/8 (10A) 3 PTFE (FKM) Brass (stainless steel) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) Note 1) 10 is available with seal meterial FKM only.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

valve Class Orifice size Model Material Port size Note 1) Body Seal 2 3 4 5 7 10 1/8 ( 6A) 2 1/4 ( 8A) 1/4 ( 8A) VCS (for steam) 2 port solenoid valve 3/8 (10A) 3 PTFE (FKM) Brass (stainless steel) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) Note 1) 10 is available with seal meterial FKM only.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57