Table of Contents Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.
Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.
Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.
Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.
New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2
Restrictor spacer VVQ5000-20A-5 SUP stop valve spacer VVQ5000-37A-5 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure exhaust VVQ5000-25A-5 Release valve spacer: For D side mounting VVQ5000-24A-5D Direct exhaust with silencer box [-SD U] Manifold mounted exhaust cleaner [-CD Ul] Interface regulator (P, A, B port regulation) ARBQ5000-00A B P -5 Refer to pages 522 to
Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-
Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D
(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold
Blanking plate assembly VVQ4000-10A-5 Individual EXH spacer VVQ4000-R-5Individual SUP spacer VVQ4000-P-502 03 02 03 Throttle valve spacer VVQ4000-20A-5 SUP stop valve spacer VVQ4000-37A-5 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-5 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ] Note) Release valve spacer VVQ4000-24A-5D Note) Double
Blanking plate assembly VVQ4000-10A-5 Individual EXH spacer VVQ4000-R-5Individual SUP spacer VVQ4000-P-502 03 02 03 Throttle valve spacer VVQ4000-20A-5 SUP stop valve spacer VVQ4000-37A-5 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-5 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ] Note) Release valve spacer VVQ4000-24A-5D Note) Double
The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure
(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold
(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed
CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55
VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread
(Common EXH type) 32 16 3 R 1(P) 40.3 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 2-6-34 Base Mounted Series VQ5000 Throttle valve spacer 179 (Plug-in type) 133 (Plug lead type) 32 16 VVQ5000-20A-1 (Plug-in type) VVQ5000-20A-5 (Plug lead type) 3 5 1(P) 4(A) 40.3 A throttle valve spacer is mounted on a manifold block to control cylinder speed
Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -