Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/2, Voltage: 24VDC, Lead Wire: Grommet Terminal w/Light & Surge Voltage Suppressor, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/2, Voltage: 24VDC, Lead Wire: Grommet, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/2, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Terminal, Manual Override: -, Bracket: -, X200: -, CE Compliance: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/2, Voltage: 110VAC 50/60HZ, Lead Wire: Conduit Terminal, Manual Override: -, Bracket: -

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR Seal), Body Material: S (Stainless Steel Body), Pilot System Option: Standard, Thread: Rc(PT), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Operating Pressure Difference

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR Seal, Body Material: Stainless Steel Body, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 1/2, Voltage: 100VAC 50/60HZ, Lead Wire: Conduit Terminal, Manual Override: Non-locking Push Extended Style, Bracket: Bracket

Table of Contents

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

MRHQ

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10 P407090-3D P407090-1 MRHQ Switch holder B MRHQ10S MRHQ16 P407090-3S MRHQ10C MRHQ20 P407090-3C P407060-1 MA Switch case MRHQ16D MRHQ25 P407060-3D MRHQ16S P407060-3S DMRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D MRHQ25S Each unit includes two of each of the parts indicated left.

Refrigerated Air dryer Series IDU/IDF

, 4D, 6D, 8D Small How to Order Voltage Model Options (No options for standard specification models) 3D 4D 6D 8D C E H 1 IDU 2 4 6 L M R S T Voltage 1 100VAC (50Hz) 100 to 110VAC (60Hz) 200VAC (50Hz) 200 to 220VAC (60Hz) 2 Single phase 240VAC (50Hz) 220 to 240VAC (50Hz) 4 6 220VAC (50Hz) Model Air compressor Refrigerant 2.2kW 3.7kW 5.5kW 7.5kW 1 3D 4D 6D 8D R134a Model and voltage combinations

AC Servo Motor Driver (Pulse input type/Positioning type ）

.1 Parameter combination error for driver communication on slave DB Parameter setting 3D error for driver 3D.2 Parameter combination error for communication driver communication on master DB 3E Operation mode 3E.1 Operation mode error DB error 3E.6 Operation mode switch error DB 1 0 0 0 42.1 Servo control error by position deviation EDB (Note 4) 42.2 Servo control error by speed deviation

Series SV

Pressure gauge or pressure transducer Temparature Differential pressure gauge or differential pressure transducer gauge g d1 Pressure control d33d1 equipment Flow control 3 valve d2 Air Filter Shut-off Flow meter 10d3 10d1 0d2 3d 3d 3 1 3d 3d 3 2 supply valve Thermometric pipe Test equipment Upstream pressure Downstream pressure measuring tube measuring tube Figure 2 Test circuit of ISO6358

MRHQ

Model Model MRHQ10 MRHQ10D P407090-3D P407090-1 Switch holder B MRHQ MRHQ16 MRHQ10S P407090-3S MRHQ20 MRHQ10C P407090-3C P407060-1 MA Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S DMRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D MRHQ25S P408080-3S Each unit includes two of each of the parts indicated left.

Rotary Gripper Series MRHQ

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

VT325

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

LEC-OM071xx

Positioning by external input command 39 EX_POSING 8.14.14 Servo Commands ZRET Zero point return command 3A Performs zero point return. 8.14.15 3C VELCTRL Velocity control command Controls speed. 8.14.16 3D TRQCTRL Torque control command Controls torque. 8.14.17 SVPRM_RD Read servo parameter command 40 Reads the specified servo parameter. 8.14.18 SVPRM_WR Write servo parameter command 41

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Take proper measures to prevent dust or foreign matter from accumulating in this area. (1) 3e 3e (4) (7) 3e (5) (6) (3e) (3d) (3d) (3c) How to Calculate the Flow Rate For obtaining the flow rate, refer to front matter. (3) 3e (9) (3a) 3d (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Connector for DIN Terminal Description DIN connector Part no. GDM2C 1454 A