Compact and Lightweight

V Port: Screw-in P/E Port: One-touch Fitting ZX Model H2 L4 Connection thread 2 ZM ZH05DA-06-01-06 12 26 Rc1/8 ZH07DA-06-01-06 ZH10DA-06-01-08 ZH13DA-08-02-10 17 36.3 Rc1/4 ZH15DA-08-03-10 19 37.1 Rc3/8 ZH18DA-10-03-12 39.1 ZH20DA-10-04-12 24 44.1 Rc1/2 ZL Metric ZH ZH ZH ZH05DA-07-N01-07 12.7 26 NPT1/8 ZH07DA-07-N01-07 ZH10DA-07-N01-09 ZH13DA-09-N02-11 17.46 36.3 NPT1/4 ZH15DA-09-N03-11

V

Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 ASR ASQ AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

AS-FG/ASD-FG

-03 12 13 40.7 44.8 5.2 6.3 9.3 11.6 6 5/32" 12.7 13.5 11.8 28.6 30.2 33.6 35.2 AS2051FG-06 AS2001FG-05 18 26 50 53.2 6.2 6.7 11.4 12.8 6 3/16" 16.5 17 14.8 29.5 27.6 34.5 32.6 AS2051FG-08 AS2001FG-07 21 31 52.2 59.8 7.1 8.1 13.2 15.2 8 1/4" 17 18 29.6 33.3 34.6 38.3 AS3001FG-06 AS2051FG-05 24 18 52.2 59 6.2 7.4 11.4 12.8 6 3/16" 16.5 17 14.8 30.5 34.1 35.5 39.1 AS3001FG-08 AS2051FG-07 26

Speed Controller with One-touch Fitting

500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1 35.6 36.8

Proposals for Energy Saving

-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

-13AB AS-14AB AS-15AB AS-16AB AS2052FS-06 AS2052FS-07 AS2052FS-08 AS2052FS-09 AS3002FS-06 AS3002FS-07 AS3002FS-08 AS3002FS-09 AS3002FS-10 AS3002FS-11 AS-24AB AS-25AB AS3002FS-12 AS-17AB AS-19AB AS-20AB AS-22AB AS4002FS-10 AS4002FS-11 AS4002FS-12 AS4002FS-13 AS-43B AS-45B AS-47B AS-48B Details of Threaded Stud Kit for Manifold Part no.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 Blanking plate assembly : Thread type Nil Rc G F 1 8" 10-KQP-01 16 31.5 5 N NPT 5 32" 10-KQP-03 16 32 6 NPTF T 1 4" 10-KQP-07 18 35 8.5 5 16" 10-KQP-09 20.5 39 10 Caution Mounting screw tightening torque Series Assembly part no.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Vacuum switch valve Vacuum release valve ZU eZFB200-06 ZFB201-07 ZL rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 Suction filter ZY Vacuum pressure switch yZFB401-13 Pad ZF Flow rate (l/min (ANR)) ZP Precautions Construction SP Be sure to read before handling.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

01, 23, 03, 04, 06, 07 AS-F 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

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1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

ARM10/11

08 18 19 20 25 26 27 32 33 34 3.

Compact Manifold Regulator

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

ARM10/11

08 18 19 20 25 26 27 32 33 34 3.