LEC-OM071xx

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

One-touch Fittings Series KQ2

Nylon Urethane 3 3 5 7 11 14 24 2.9 5.6 13.1 18.0 29.5 46.1 (96) 3.4 5.6 13.1 26.1 41.5 58.3 113 3.2 4 6 8 10 12 16 15.5 16 17 18.5 21 22 25 31.5 32.5 34.5 38.5 42.5 44.5 51 9.6 10.4 12.8 15.2 18.5 20.9 26.5 KQ2H23-00 KQ2H04-00 KQ2H06-00 KQ2H08-00 KQ2H10-00 KQ2H12-00 KQ2H16-00 Note) ( ): Values for soft nylon.

LEC-OM02704CN

CCW CW A A 0 B B A A 1 B B 0 1 2 PC20 *SNO RS-422USB 11 0 0 31 PC21 *SOP RS-422 RS-422 0h 0 0 RS-422 0 9600[bps] 1 192 00[bps] 2 384 00[bps] 3 576 00[bps] 4 115200[bps] RS-422 0 1 800s PC22 *COP1 C-1 0h 0 0 0 0 2 1 4 LE-CSE-2, LE-CSE-5, LE-CSE-A 2 1(A16) 2(A20) 15 90 15 PC23 0h PC24 0h PC25 0h PC26 *COP5 C-5 0h (A99) 0 0 0 (A99) 0 1 1LSP 1 LSNOFF

Stainless Steel 316 Fittings

Width across flat Effective area (mm2) Weight (g) d M L Model 2 x Applicable tube H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 7 11 25 43 42 44 42 71 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 5 21.8 8 8 d 5.8 6.6 24.8 28.6 10 14 10 14

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

JXCx-OMX0009

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Micro Mechanical Valve Series VM1000

VM1110-4NU-00 VM1010-4NU-00 Mounting hole T.T.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8m *1 8 Green 3 COM-A/COM B-3 10m *1 A Blue 4 COM-B/ A-3 Shield 15m *1 B Cable color Terminal no. Vcc B-4 Brown 12 *1) produced upon receipt of order. 20m *1 C GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 3 selected.

Table of Contents

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

30

(mm) M Weight (g) D Note 1) L Model 2 x Applicable tube 3.2 4 6 8 10 12 16 KQB2H23-00 KQB2H04-00 KQB2H06-00 KQB2H08-00 KQB2H10-00 KQB2H12-00 KQB2H16-00 9 9 12 14 17 19 24.6 25 26.2 28.2 33.2 35 38.2 42.6 6.8 6.8 12 17.4 27.2 33.7 56.1 3.4 5.6 13.1 26.1 41.5 58.3 113 12 12.6 13.6 16.1 17 18.6 20.8 D M M L Note 1) D is maximum diameter. Note 2) Value of FEP tube.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Flow characteristics Max. operating pressure differential (MPa) Flow characteristics Max. system Max. operating pressure differential (MPa) Max. system Orifice size (mm) Model AC DC Orifice size (mm) Model AC DC pressure pressure (MPa) (MPa) C[dm3/(sbar)] 0.48 C[dm3/(sbar)] 0.48 b 0.18 Cv b 0.18 Cv VX2111-00 VX2121-00 VX2221-00 VX2321-00 VX2131-00 VX2231-00 VX2331-00 VX2241-00 VX2341-00 VX2113

JXCx-OMT0023

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 21 11.

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

.: 07 (ø1/4"), Actuator Type: 00 (Basic Style)

Number of Ports: 2 Port, Piping Direction, Bar Height: Side Ported, Long, Basic Only, Tube O.D.: ø1/4", Actuator Type: Basic Style, Suffix: -, Indicator: -, Bracket: -