SI Unit for Vacuum Manifold

DC_UPLOAD_REQ 0x54 01b(1)(single shot) (1) 0xFF91 (Notification) -30No.EX-OMZ0018 8.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping port ( ): VVP460 Grommet Individual EXH: VVP450Station 2Port size VVP460Station 2Port size Conduit terminal DIN terminal Piping port G 1/2 G 1/2 Mounting hole Applicable cable O.D. 6 to 12 4n-1/2, 3/4 Piping port (3/4, 1) Stations n: Station L

Booster Regulator/Air Tank

VBAT5A-Y-3N VBAT10A-Y-3N VBAT20A-Y-3N VBAT5S-Y-4N VBAT10S-Y-4N VBAT20S-Y-4N VBAT5A-Y-3 VBAT10A-Y-3 VBAT20A-Y-3 VBAT5S-Y-4 VBAT10S-Y-4 VBAT20S-Y-4 Quantity Model No.

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

VQ7-6/7-8

Control unit Po 3 5 P" Caution In the case of air filters with auto-drain or manual drain, mount so that the air filter is at the bottom. 3-10-18 ISO Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal Series VQ7-6 Manifold with control unit 201.5 189.5 165.5 153.5 121 155 (3 position) 145 (Double) 65 55 120.5 (Single) 44 16 68.5 100 14 4n-1/4, 3/8 2n-1/8 9 80 3 (A, B port) VK U side

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

Series AK1000

AK3542 & 4542 Body material: 316 SS Normally closed RoHS How to Order (Inlet) (Outlet) 3 4T 4T AK 542 S2P Size Seat material Code Cv 3 0.29 4 0.5 Code Material No code PCTFE (Standard) VS Polyimide Model Connections Code Status Maximum operating pressure 542 Normally closed (N.C.) 125 psig (0.9 MPa) Code Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N

Directional Control Driver for Electric Cylinder

VHR-4N: J.S.T. Mfg Co., Ltd.) VHR-2N: J.S.T. Mfg Co., Ltd.) BVH-21T-P1.1: J.S.T. Mfg Co., Ltd.) Caution Do not apply repetitive bending or pulling stress to the cable. Wiring with repetitive bending or pullling stress to the cable will likely cause the cable to break.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

switch With auto switch Bore size (mm) Stroke range (mm) L1 L CZ CX CW CU CT CD A B CL A 60 70 68.5 78.5 80.5 90.5 B 23 33 29.5 39.5 30.5 40.5 CL 50 60 58.5 68.5 66.5 76.5 5 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 Rod end nut 32 Rod end male thread 7 36 18 20 14 5 10 28.5 70 33 60 40 7 36 18 22 14 6 10 28.5 78.5 39.5 68.5 Double clevis style: CQ2D/CPQ2D 50 8 44 22 28 20 7 14 33.5 4N

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1F4: LQ-4N LQ1F5: LQ-5N Different diameter tubing order example Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Union elbow Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A B Only select combinations from the same body class.

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Size: 3 (0.29 Cv), Inlet Connection: 4N (NPT 1/4 Male), Outlet Connection: 4N (NPT 1/4 Male)

Size: 3 (0.29 Cv), Inlet Connection: 4N (NPT 1/4 Male), Outlet Connection: 4N (NPT 1/4 Male)

LC-OM089xx

LC3F212-5[][]A) Contact BVH-21T-P1.1 12 Directional control equipment 1 Operation manual (This document) 1 Cross recessed bind screw M3 4 1 Spring seat Nominal3 1 ground terminal Tooth lock washer (A) Nominal 3 1 Housing VHR-2N 1 Housing VHR-3N 1 Housing VHR-4N 1 Ensure parts below are included in the package. Disposal Dispose as general industrial waste. 2.

Mechanical Valves Series NVM, NVFM, NVZNI

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07