VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ 743 Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting ASDF-D Series RoHS Model Applicable tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

PFM7

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 T Panel mount adapter (For without flow adjustment valve) R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) Nil None ZS-33-J ZS-33-M

IR1000/2000/3000

Note) X465 AMR Note) Except symbol G ITV IC Switch specifications Output specifications NPN output PNP output 1 to 5 V output 4 to 20 mA output Symbol A B C D VBA VE VY1 With digital pressure switch G PPA Note 1) Please contact SMC separately for details about the external dimensions, etc.

1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Filter Regulator

D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Regulator

Hexagon wrench (Nominal size: 4) Tightening torque: 0.6+/-0.05 N m Note) Applicable to the product without pressure gauge. (13) Plug (with O-ring) (13) Plug (with O-ring) Regulator (AR20K-D / AR30K-D / AR40K-D/ AR50K-D/ AR60K-D) Regulator (AR20-D / AR30-D / AR40-D/ AR50-D/ AR60-D) -23- 10-8.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

PFxx-OMA1007

Recommended tightening torque Unit: Nm Applicable models AMS20 AMS30 AMS40 AMS60 Part No. of spacer with bracket Y200T-2-D Y300T-2-D Y400T-1-D Y600T-2-D Part No. of spacer Y200-D Y300-D Y400-D Y600-D Tightening torque 0.360.036 1.20.05 1.20.05 2.00.1 When the air management system is fixed on a wall with hexagon socket head cap screws, a hexagonal driver is recommended as a tool.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

E-ITV-STD-RF-A

N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P8) Press Skey f or 2 seconds or m ore, t hen go t o det ai l set t i ng m ode. To "F01" by usi ng t he and keys. ( di spl ayed al t ernat el y) Press Skey. Set t he G AI N by usi ng t he and keys. ( bl i nk and change t he m ost ri ght di gi t ) 13 Press Skey.

Common Supply Regulator

AR20M-D AR30M-D AR40M-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap Body -22- 11-2.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

EXxx-OMW0014CN

EX245-SPN1A SI FO LED 02dB FO LED 0dB (6.4.5 FO LED) (F01 EX245-SPN1A FO1: ON FO2: OFF 1 2 11 2 3SI EX245-SPN1A 34 No.EX-OMW0014CN-A 6. SI 6.1.