CATALOG

04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

Table of Contents

03 04 q Description No.

V

14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VV5FR5-10-061-04 1 set (Manifold part number) VFR5110-5D 5 sets (2 position single) VFR5410-5D 1 set (3 position exhaust center) VVFS5000-R-04-2 1 set (Individual EXH spacer) VQ4 VQ5 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

03 04 No.

VFS

03 04 q Description No.

VFR

VFR4110-5D 5 sets (2 position single part no.) VFR4410-5D 1 set (3 position exhaust center part no.) VVF4000-R-04-2 1 set (Individual EXH spacer part no.) VV5FR4-01T-061-03 1 set (Manifold base part no.) VFR4100-5FZ 3 sets (2 position single part no.) VFR4200-5FZ 2 sets (2 position double part no.) VVFS4000-10A1 set (Blanking plate assembly part no.)

Vacuum System Peripherals:

H L Option Pressure gauge Combinations R: Rear pressure gauge mounting Standard specification Valid combination Invalid combination Pressure gauge VAC (Vacuum pump side) SET (Pad side) Applicable model Specifications Symbol L H O S C U K IRV2000 IRV3000 IRV1000 P SMC Connection Rc 1/8 01 Connection Rc 1/4 02 Standard specifications Connection Rc 3/8 03 Accessory Connection Rc 1/2 04

1

Symbol Stations Note Symbol Stations Note 02 02 2 stations 2 stations All double wiring All double wiring 04 02 08 02 8 stations 4 stations The asterisk denotes the symbol for assembly. Prefix it to the part numbers of the valve etc. 2 stations 2 stations All single wiring All single wiring 08 12 The valve arrangement is numbered as the 1st station from the D side.

2

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

Compact Hydraulic Cylinder

Bracket for clevis type 20: I-02 25: I-03 32: I-04 40: IHN-04 L tap 4 x J counter bore 4 x K RR1 NDH10 MM A B E F RR1 45 MM NDH10 D +0.2 +0.1 E1 E1 M C U1 U1 A1 NX R U A1 L1 L1 NX H Material: Rolled steel plate Material: Rolled steel plate I G Material: Cast iron E1 MM NX Applicable bore size (mm) Applicable bore size (mm) I-02 I-03 I-04 IHN-04 Part no.

Hydraulic

A1 L1 R1 U1 NDH10 U(H8) E1 MM NX Applicable bore size (mm) Applicable bore size (mm) I-02 I-03 I-04 IA-04 Part no.

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Compact Hydraulic Cylinder

CHQ CHQ C D CHK Mounting Bolts CHQWB20-5D (M) C D C D Model Mounting bolt part no. Model Mounting bolt part no.

VQ5000

SUP stop valve spacer VVQ5000-37A-5 03 04 03 04 SUP blocking plate VVQ5000-16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.

Free Mount Cylinder for Vacuum Series ZCUK

Note 1) In the case of ZCUKQ16-5D: 14.5 mm.

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -