CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Flange style (20 to 32) Be aware that the cylinder mounting bolts and the fitting could come in contact with each other in the following styles: q Front flange style with the front end lock, w Rear end flange style with the rear end lock, and e With double end lock.

MHY2/MHW2

8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 X 0.45 X 25 l M3 X 0.5 X 30 l M5 X 0.8 X 40 l Pulling force 4.9N 10N 24.5N Stroke (mm) 2 3 3 e Release lock when mounting or adjusting the cylinder. If mounting is done with lock engaged, lock mechanism may be damaged. * Remove bolt under normal operations.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

2

e !

CE

c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3. F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VF5120-1G-032 pcs. (Valve) VF5220-1G-032 pcs. (Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J G E G A B Plug JSXM 1G(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D E F G 20 1/8

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

For AC voltages add 1g to the weight of the single solenoid and 2g to the weight of the double solenoid and 3 position styles.

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

When AC is used, add 1g.

Size, Body, Valve Type: 10N (Size: 1; Body Mat'l: Resin; Port Size ø8 One-touch Fitting; Orifice Dia: 5, N.C.), Voltage and Electrical Entry: E (230VAC; Grommet w/Surge Voltage Suppressor)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Port Size: 10 (1), Thread: N (NPT), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty)