Manifold Specifications

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS3000-4-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O-ring e, r, Seal A q Non plug-in base type: Type 51 VVZS3000-1A-2-Port size (1) Manifold block u, Junction box i, Lead

E-MY2_E_D

type H Linear guide single axis type Auto switch HT Linear guide double axis type Cable length Nil Controller integrated type 1m M Nominal size Controller separated type 3m L 16 5m Z 25 Positioning stop number Speed type Nil 3 positions L Low speed A 5 positions M Medium speed Stroke Output type Nil Standard speed N NPN H High speed P PNP Motor placement Load type TA On the top, (left) Q

CATALOG

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E210 & N320 1.123 LINEAR ACTUATOR: COMPACT CYLINDER SERIES NCQ2/CQ2 A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 S I N G L E R O D C L E V I S ( R O D E Y E ) A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S ( R O D E Y E ) CQ2 SINGLE ROD

A

T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S N C Q 2 / C Q 2 M5 0.8 M6 1 M8

Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Stopper Cylinder

0 w q e r t u !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA F Q Stroke QB QU QW Built-in One-touch Fittings (mm) Applicable tubing O.D.

MGP

M3 x 0.5 x 30l or more 40, 50, 63 10N 3 M5 x 0.8 x 40l or more 80, 100 24.5N 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type manual release While pushing the M/O knob turn it 90 counter clockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob.

MHZ

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Refer to POINT of section 3.6.1 for logic of MELSEC iQ-R series/MELSEC-Q series/MELSEC-L series/MELSEC-F series.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Description q Notes No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Description q Notes No.

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

MHY2/MHW2

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

VZ1000

r VZ1000-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

2-Color Display Digital Flow Switch Series PFM

Construction Component Parts q w q o ire uy!0 o t Material No. Description Note 1 Fitting for piping Brass Electroless nickel plated 2 O-ring FKM Fluoro coated 3 O-ring HNBR Fluoro coated Stainless steel 304 4 Rectifying module !

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !