VFS

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

Table of Contents

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 The asterisk denotes the symbol for assembly.

LEC-OM071xx

Communication Command Phases*2 Profile Command Operation Code (Hex.) 1 2 3 00 NOP No operation 05 ALM_RD*1 Read alarm/warning 06 ALM_CLR Clear alarm/warning state 1D MEM_RD*1 Read memory command Servo Commands 1E MEM_WR*1 Write memory command 30 SMON Monitor servo status 40 SVPRM_RD*1 Read servo parameter 41 SVPRM_WR Write servo parameter 1.

PC Wiring System Series PCW

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufactures (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 3/4, Thread: -, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: None, Port Size: 1, Thread: NPT, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: NPTF, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: w/o Sub-plate, Thread: Rc, CE-Compliant: CE-Compliant

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: -, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 3/4, Thread: NPT, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 200 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 3/4, Thread: -, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 3/4, Thread: -, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: -, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: NPT, CE-Compliant: -

Function: 2 Position, Double, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 3/4, Thread: NPTF, CE-Compliant: -