ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

VQZ1000/2000/3000

PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable

AS

10 AS231F-02-03 10.4 39.6 30.6 16 16.2 21.9 10.9 47.9 38.7 40 10 5/32" 20.2 18.5 31 21 1/4 33 AS331F-02-06 AS231F-02-05 11.6 31.1 16.5 23.9 16.2 42.1 10.9 46.5 38.5 60 6 3/16" 20.6 12.9 12.8 25.2 17 17 36 AS331F-02-08 AS231F-02-07 13.2 18.5 17 34.2 34.4 29.4 39.9 45.1 34.9 18.3 25.6 49.5 39.7 63 8 1/4" 12.9 20.6 15.2 28.2 18.5 (17.5) 48.3 43.3 37.8 42.8 23 39 AS331F-02-10 AS231F-02-09 15.2

2/3 Port Valve

Port size 01 02 03 1 8 1 4 3 8 Rc(PT) (VXV31) Rc(PT) (VXV31, 32, 33) Rc(PT) (VXV32, 33) Dimensions The single dimension is the same as a series of VX31, 32, 33 in p.4.1-51. 4.1-52 Direct Operated 3 Port Solenoid Valve/Manifold Series VVX31/32/33 For Air, Gas, Vacuum and Oil Configuration can be changed from NC to NO and from NO to NC by simply changing a gasket.

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Direct Operated

Max. system pressure (MPa) Flow characteristics C[dm3/(sbar)] 0.08 0.15 0.20 0.08 0.15 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv 0.32 0.25 0.20 0.32 0.25 b VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.29 0.60 0.82 0.29 0.60 0.7 0.4 0.2 0.7 0.4

5 Port Solenoid Valve Series VQZ1000/2000/3000

SZ 69.4 16.9 39.1 VP4 Approx. 300 (Lead wire length) 130.7 S0700 + + VQ 57 41.6 26.5 2 x PE port VQ4 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (External pilot port) VQ5 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 21 (18) 21 (18) M5 x 0.8 (Not used) 33 VQC 66 ( ): VQZ335-G1-02 VQZ L-type plug connector (L): VQZ3 5 (R)-L10 1 3 4 5 02 03 DIN terminal (Y): VQZ3 5 (R)-Y10 1 3 4 5 02

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

): 10-SY7140(R)02 03 M8 connector (WO): 10-SY7140(R)-WO02 03 D Y 110 [112.2] Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 93 74.2 85.5 79.2 Max. 10 119.1 43.1 58.5 [65.5] 59.1 63 45.5 M8 x 1 69.6 [76.6] (Lead wire length) Approx. 300 Pg7 100.2 [102.4] 95.2 120 109.1 101.7 20.5 20.5 33 6.4 20.5 20.5 33 6.4 33 20.5 20.5 20.5 20.5 33 6.4 11.5 13.5 26.5 11.5 26.5 13.5 11.5 6.4

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

KQ2

M14 x 1 19 KQ2E06-03 17 33.5 34 17 31.5 15 17 13.1 10.4 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 33 17 M16 x 1 19 KQ2E08-03 15 35 34 22 41.5 29.5 10 21 24 KQ2E10-02 12.5 34.5 53 21 M20 x 1 22 KQ2E10-03 14 36.5 67 24 58.3 46.1 12 22 27 KQ2E12-03 14 37 92 23 M22 x 1 KQ2E12-04 18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 x 1.5 KQ2E16-04 18 44 132 Note) ( )

KR

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

or less VQZ2351lC 0.3MPa 25 or less 33 or less 58 VQZ2351SlC SX 20 or less 26 or less VQZ2450lC Exhaust 54 0.15MPa 25 or less 33 or less VQZ2451lC symbol center VK 25 or less 33 or less VQZ2451SlC 58 54 58 25 or less 33 or less VQZ2551lC Pressure center 25 or less 33 or less VQZ2551SlC VZ 9 8 7 6 5 4 3 2 1 Fully open Number of needle rotations (turns) 10 Note 1) Valve for sub-plate and maximum

0.55

How to Order Manifold Assembly Example (VV5F3-30) Double solenoid (24 VDC) Closed center (24 VDC) VF3230-5GZ1-02 (1 set) VF3330-5GZ1-02 (1 set) Single solenoid (24 VDC) VF3130-5GZ1-02 (3 sets) Manifold base (5 stations) U side D side VV5F3-30-051 1 3 2 Stations VV5F3-30-051 1 set (Type 30, 5-station manifold base part no.) VF3130-5GZ1-02 3 sets (Single solenoid part no.)

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3

Table of Contents

31 10.9 20.2 16.2 40.1 21.9 40 48.4 30.6 16 10.4 5/32" 1/4 AS231F-02-05 AS331F-02-06 38.5 47 33 17 6 12.8 10.9 25.2 16.2 60 12.9 20.6 31.1 16.5 23.9 42.6 11.6 3/16" 17 (17.5) AS231F-02-07 AS331F-02-08 39.7 50 36 40.4 18.5 8 15.2 28.2 18.3 45.6 25.6 63 20.6 12.9 17 18.5 34.2 35.4 34.4 29.4 13.2 1/4" 42.8 37.8 43.8 48.8 23 AS231F-02-09 AS331F-02-10 43.7 54.4 39 21 10 18.5 32.6 18.3 67 23 18.5

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10