VM

-7 Series VM100 P.3.5-11 Series VM200 P.3.5-19 Series VM400 P.3.5-25 Series VZM500P.3.5-40 Series VZM400P.3.5-34 Series VFM300P.3.5-47 Series VFM200P.3.5-53 Series VM800 P.3.5-31 Related Products Page Relay Valve P.3.5-59 Shuttle Valve P.3.5-62 Time Delay Valve P.3.5-61 Pneumatic-Electric Relay P.3.5-63 Pneumatic Indicator P.3.5-64 3.5-3 Series VM Precautions Be sure to read before handling

VM

-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.

Compact Vacuum Unit

ZB1-PS1-A (PSE541) Rated pressure range Proof pressure Output voltage Output impedance Power supply voltage Current consumption Accuracy Linearity Repeat accuracy Effect of power supply voltage Temperature characteristics 72.5 psi (500 kPa) 1 to 5 VDC Approx. 1 k 10 to 24 VDC10%, Ripple (p-p) 10% or less 15 mA or less 2% F.S.

VFR5000 Series

Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) Ambient and fluid temperature marking Model A B + B Port size fo connection of pressure gauge Rc 1/8 VFR5100 A side COM Weight (kg) 0.83 Effective area at supply side (mm 2) PA 44 38 32 VFR5200 A side COM B side VFR5400 3 5 A side COM B side S at P 1=0.7 MPa/P 2=0.5 MPa PB 38 40 31 Effective area at exhaust side

VFR4000-OMH0003

P 1= 0.7 MPa/P 2=0.5MPa PB 31 31 24 Although A, B+ and B marks are indicated on the terminal 55 Effective area at exhaust side(mm 2) AEA block, VFR4000 can be used as either +COM or COM. 45 S at P 2 = 0.5 MPa BEB solenoid valve.

VFR3000 Series

Regulating port A B P Connect each lead wire of power side corresponding to respective solenoid valve on the lower terminal block. Maximum operating pressure 1.0 MPa (1) Terminal block wiring specifications is in accordance with COM.

20

Effects of reduced flow volume P Effects of reduced power consumption P Effects of lowered pressure 10.4% reduction in flow volume 20% reduction 16.7% reduction in pressure After improvement Before improvement After improvement Before improvement After improvement Before improvement Features 2 Blow Gun, CoilTube and S Coupler Selection Recommended system in accordance with the distance Energy

ZB-OM00301

100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F

VFR3000-OMJ0001

SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 () () 1.1Nm ) SOL.ASOL.B 1 AC 2 SOL.ASOL.B 1 DC24V 2 9 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 3 3 3 3 DIN DIN DIN DIN / / / / 01T 01T 01T 01T DIN (A B AB) COM 1.25-3.5M1.25Y-3L1.25-3M VFR3000 AB+ B+COM -COM 90 O 1) 0.9MPa 2) 3) MAX.50 4) 2 5) P 3 AB ARBF3000 P AB ARBF3050 A B P 1.0MPa 1)

VFR5000-OMN0001

P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax:

VFR2000 Series

Lead wire connection 01F Type D-sub Connector Wire connection specification Lead wire at both of solenoid A and B sides in manifold is connected to connector terminal as COM specification. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

S

O R T S T H R E A D A C T U AT O R PT N NPT * Remove (N) when ordering 00 Basic Type 01 Roller Lever 13 Adjustable Roller Lever 14 Adjustable Rod Lever H O W T O O R D E R NVM800 A C T U AT O R O N LY Roller lever VM-01F Adjustable roller lever VM-13F Adjustable rod lever VM14F FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E104 & N261

Electro-Pneumatic Proportional Valve

16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P

Series: 3 (VFA3000), Actuation: 1 (2 Position Single), Body: 30, A, B Port Size: 01 (1/8), Thread: F (G), Bracket: F (w/Bracket)

Series: VFA3000, Actuation: 2 Position Single, Body: 30, A, B Port Size: 1/8, Thread: G, Bracket: w/Bracket, Pilot Port Direction: -

type (with D sub-connector): ⑦ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①, ②, and ③.

type (with D sub-connector) ④ Type 01F with D sub-connector
Note) For the electrical connection of the DIN terminal type, refer to ①.

Series: 3 (VFA3000), Actuation: 1 (2 Position Single), Body: 30, A, B Port Size: 02 (1/4), Thread: Rc, Bracket: w/o Bracket, Pilot Port Direction: P (Lateral)