Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

Rotary Table Series MSU

Adjustment: Max. 8.2 6 B port A port 0.5 +0.025 0 3-3H9 long groove depth 2.5 ( A , B , C ) 5g6 0.004 0.012 12h9 0 0.043 4-M4 x 0.7 depth 8 34 0 0.062 42h9 Top ports/MSUA3-SE 36 10 A port B port 2-M3 x 0.5 11 5 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

ZL3-OM00801

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

VEX-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

This is a legacy product, and replaced byVEX1900-20N-G

Type: Master Valve, Application: Single Unit, Mounting Orientation: Direct, Voltage: -, Specification: Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: -, Status at Power Off: -, Valve Positions: 2-Position Normally Closed, Applicable Cylinder Diameter(Ø): 40 to 300, Pipe Port Type: [Rc (R)] Rc, Port Size: 1 1/2, Pressure Rating(MPa): -0.1~1, Driving Type: Pilot

Type: Master Valve, Application: Single Unit, Mounting Orientation: Direct, Voltage: -, Specification: Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: -, Status at Power Off: -, Valve Positions: 2-Position Normally Closed, Applicable Cylinder Diameter(Ø): 40 to 300, Pipe Port Type: G, Port Size: 1 1/2, Pressure Rating(MPa): -0.1~1, Driving Type: Pilot Type Spool

Size: 90 (Body Ported), Operation: 0 (Air Operated Style), Port Size: 14 (1+1/2), Thread: F (G(PF)), Voltage: Air Operated, Lead Wire: None, Surge Suppressor: None, Option: B (Bracket)

Size: 90 (Body Ported), Operation: 0 (Air Operated Style), Port Size: 20 (2), Thread: Rc(PT), Voltage: Air Operated, Lead Wire: None, Surge Suppressor: None, Option: B (Bracket)

Size: 90 (Body Ported), Operation: 0 (Air Operated Style), Port Size: 14 (1+1/2), Thread: Rc(PT), Voltage: Air Operated, Lead Wire: None, Surge Suppressor: None, Option: B (Bracket)

Size: 90 (Body Ported), Operation: 0 (Air Operated Style), Port Size: 14 (1+1/2), Thread: N (NPT), Voltage: Air Operated, Lead Wire: None, Surge Suppressor: None, Option: B (Bracket)

Size: Body Ported, Operation: Air Operated Style, Port Size: 2, Thread: Rc(PT), Voltage: Air Operated, Lead Wire: None, Surge Suppressor: None, Option: Bracket