CLS

BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63 71 1/4 1/4 1/4 3/8

Table of Contents

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZJ 3.5 4.5 5 7 8 ZI 6 10 12 16 20 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 7 5 5 5 3 7.5 5 3 5 3 90 90 5 90 5 A MHZ 20 20 20 20 (3 x SA) 20 20 MHF Section SD SD MHL MHSJ3-63D MHSJ3-80D MHR MHK 4 MHS 10 4 11 MHC 3 5 3 5 90 90 MHT 5 MHY 20 20 20 20 MHW -X (mm) L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5

Table of Contents

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Proposals for Energy Saving

Note 2) For 1.0MPa Note 3) With two mounting screws How to Order AR 00 30 BG 1N 03 Option specification Regulator Set at 0.2MPa Non-relieving Flow direction: Right to left Note) 1 N R Body size AR4000 AR3000-BG M5 10 20 25 30 40 50 60 If specifying more than one option, list symbols in alphabetical order.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50, 63 80, 100 125 GKM10-20 GKM12-24 GKM16-32 GKM20-40 GKM30-54 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 M10 x 1.25 10 40 10 10 52 20 20 12 12 62 M12 x 1.25 12 48 24 24 16 16 83 M16 x 1.5 16 64 32 32 M20 x 1.5 20 80 20 20 105 40 40 M27 x 2 30 110 30 30 148 54 55 Piston Rod Ball Joint KJ (ISO 8139) l l3 d6 (Max.) l d3 b1 h12 h d1 H9 l3 Part no.

C95

R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20

VFS

Spool/Sleeve Adapter plate r Resin t Resin End plate y Resin Piston u Resin Junction cover i Resin Light cover Part no. for mounting bolt and gasket BG-VFS3000 Replacement Parts VFS31 VFS32 VFS33/34/35 Part no. No. Description Material Return spring Gasket Stainless steel NBR VFS3000-17-1 VFS3000-20 VFS3000-20 VFS3000-17-2 VFS3000-20 o !0 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

-20 Rc 1/8 T VQ F Option VQ4 Symbol Stations Passage Porting specifications 2(B), 4(A) 3(R2), 5(R1) 1(P) Common Rc VQ5 Symbol 02 2 stations 1 8 Common Rc 1 8 Top Rc 1 8 VQC 1 15 15 stations VQZ Base model Model Applicable valve model Pilot exhaust Pilot individual EXH VV5FS1-30 SQ VFS VFS120--01 20 Part no. for mounting bolt and gasket VFR BG-VFS1030 VQ7 Pilot common EXH VFS130--01 30 VFS120

VZS

For details, refer to pages 3-7-19 and 3-7-20.

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

V100

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Best Pneumatics Vol. 14

20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Rotary Table/Rack & Pinion Style Series MSQ

Load A Displacement MSQ1A MSQ10 MSQB10 (Basic type) MSQB1A (Basic type) 100 Displacement m Displacement m 400 80 MSQA1A (High precision type) 60 350 40 10 20 30 40 MSQA10 (High precision type) 20 0 5 10 15 20 25 30 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 Displacement m Displacement m 80 250 60 MSQA2A (High precision type) 10 20 30 40 190

Modular F.R.L. Units

20 20 20 20 20 20 15 The combination of metal bowl: 2 and 8 is not available. 16 When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. 17 For pipe thread type: NPT.

Modular F.R.L. Unit

117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

Modular F.R.L. Unit

43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.

C95

Bore size (mm) C76 GKM10-20 40 10 20 20 10 + 0.50 + 0.15 32 52 M10 x 1.25 GKM12-24 48 12 24 24 + 0.50 + 0.15 40 12 62 M12 x 1.25 C85 GKM16-32 64 16 32 32 + 0.50 + 0.15 50, 63 16 83 M16 x 1.5 + 0.60 + 0.15 M20 x 1.5 GKM20-40 80, 100 20 80 20 105 40 40 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data d3 Part no. d1H9 h d6 max. b1h12 l min. a l3 Bore size (mm) 32 KJ10D 10

C95

Bore size (mm) C76 GKM10-20 40 10 20 20 10 + 0.50 + 0.15 32 52 M10 x 1.25 GKM12-24 48 12 24 24 + 0.50 + 0.15 40 62 12 M12 x 1.25 C85 GKM16-32 64 16 32 32 + 0.50 + 0.15 50, 63 83 16 M16 x 1.5 + 0.60 + 0.15 M20 x 1.5 GKM20-40 80, 100 105 40 40 20 80 20 C95 CP95 NCM NCA D-X 20Piston Rod Ball Joint KJ (ISO 8139) Steel Data d3 Part no. d1H9 h d6 max. b1h12 l min. a l3 Bore size (mm) 32 KJ10D 10