Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

HRL

Terminal resistance Terminal resistance Circuit diagram SD+ SD SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG 2 SD+ 7 SD 5 SG Master This product This product This product (1st slave) (2nd slave) (31st slave) Do not connect with other pins.

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

Thermo-con/Rack Mount Type

Signal contents RS-232C RS-485 1 Unused BUS+ 2 RD Unused 3 SD Unused 4 Unused Unused 5 SG SG 6-8 Unused Unused 9 Unused BUS 8 Contact b for output cutoff alarm (closed when alarm occurs) 5 4 3 2 1 3 9 Contact a for upper/lower temp. limit alarm (open when alarm occurs) 10 Common for upper/lower temp. limit alarm 4 11 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) 12

Step Motor Controller

Note 4) L Note 2) CN1 CN1 Sequencer power supply .

A_HEC-OM-J017

setting temperature -4-1 4.3 Reading internal sensor -4-2 4.4 Reading external sensor -4-3 4.5 Reading alarm status -4-3 4.6 Reading temperature average data -4-5 4.7 Offset setting (without writing EEPROM) -4-5 4.8 Reading offset -4-5 4.9 Temperature setting (with writing EEPROM) -4-6 4.10 Offset setting (with writing EEPROM) -4-7 5 Troubleshooting -5-1 6 Communication Format and Examples

Series: 350 [3 Port COM (Single Unit)], Voltage: S (5VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

Programless Controller Series LECP1

4.

One-touch Fittings

[mm] Weight [g] With a rib Nylon Urethane 3.2 1/8 KQ2W23-01S 10 7.1 10 14.5 30.3 30.8 13.3 2.8 2.4 2.5 10.8 1/4 KQ2W23-02S 14 7.1 10 14.5 32.8 31.7 13.3 2.8 2.4 2.5 27.3 Applicable tubing 4 1/8 KQ2W04-01S 10 8.2 10 14.8 29.9 30.9 13.3 4 4 3 11 V 1/4 KQ2W04-02S 14 8.2 10 14.8 33.3 32.7 13.3 4 4 3 27.5 V M L1 6 1/8 KQ2W06-01S 10 10.4 10 15.5 31 33.1 13.3 10.9 8.6 4.5 11.4 1/4 KQ2W06-02S

Electric Actuator

Origin Note 3) 4 [2] 2 [4] 20 15 15 Motor cable (2 x 5) 65 33 40 Cable length y 250 8.7 6 20 Belt tension adjustment bolt (M3: Width across flats 2.5) 0.025 0 ( ) 3H9 depth 3 5.5 n x 3.4 11.7 4 M4 x 0.7 thread depth 7 (F.G. terminal) 34 150 D x 150 (= E) B 8 [mm] 20 Model L 495.5 695.5 795.5 895.5 995.5 1095.5 1195.5 A 435 635 735 835 935 1035 1135 B 6 10 10 12 14 14 16 n 2 4 4 5 6 6 7 D

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details, refer to page 2-4-92.

Stroke Reading Cylinder and Counter

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Table of Contents

4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

CE

0u @4 !2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.