CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

VQ5000

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

HRX-OM-W002

30B G G4 [ ] 18AWG G/Y L2/N G Inverter G4 G4 2 2 [ ] 4 [ ] 18AWG BK 18AWG G/Y 18AWG G/Y 4 IV W W [ ] 3 BK 18AWG BK 8 8 3 W L1/L V M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

VQ5000

Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

HRX-OM-X071

and G thread, use a conversion connector available as an accessory separately. 2 For water-cooled type.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Weight Product no. Weight [g] Note LE-CP-1-B-S 240 Standard cable LE-CP-3-B-S 380 LE-CP-5-B-S 630 LE-CP-1-B 190 Cable color Connector D terminal no.

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Electric Actuator/Slider Type

L Foot F Rod ange 2 4 G Head ange 2 5 D Double clevis 3 1 Mounting bracket is shipped together, (but not assembled). 2 For horizontal cantilever mounting with the rod ange, head ange and ends tapped, use the actuator within the following stroke range.

HEC_W-E

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig

HRX-OM-M090

G (PT-G conversion fitting is included) 20 1-phase AC200230V(50/60Hz) N NPT (PT-NPTconversion fitting is included) Fig. 2-1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-M090 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1pc. 1 Quick manual (with a clear cover) 2 Alarm code list label 1pc

HRX-OM-O021

Model number: HRS050-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

V100

Double solenoid Single solenoid 81 4 6 8 1 2 1 1 Thread type 1 2 Passage, Type of actuation Rc G NPT NPTF T N F Nil Port size (IN, OUT port) N.C.

JXCx-OMU0004

P.65 * ALARM 10 2 e M7 LED f h 3 h 15 7 LED f F g 7 LED f ON(LED a ON 8.1 P.40 10.P.50 25 No.JXC-OMU0004-A (4) 5 AB 2 3 7 LED f (A [1] h ( 3) 7 LED f h h *0F(15) 7 LED f LED a [2]LED a g LED b 7 LED f g 7 LED f g h g g [2]7 LED f C LED b ) g h F15 g 2 (B 26 No.JXC-OMU0004-A [3] i j * i j i j * i j 8.4 P.43 [4] g 1 g [5]7 LED f i 7 LED f j