Precision Regulator

Within 1% of full span Air consumption (At supply pressure of 1.0 MPa) (5) SRH 11.5 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

RQ

4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

IR1000/2000/3000

less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) (4) Air consumption Rc 1/4 Rc 1/4, 3/8, 1/2 Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/8 Port size Rc 1/8 (2 locations) Pressure gauge port Ambient and fluid temperature 5 to 60C (No

Precision Regulator Series IR1000/2000/3000

Air consumption 11.5 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With

IR1000/2000/3000

Applicable model Description IR100 IR200 / IR2120 IR300 / IR3120 1 Air filter 2 Mist separator 3 L bracket 4 T bracket 5 Spacer 6 Spacer with L bracket (3 + 5) 7 Spacer with T bracket (4 + 5) AF2000 AF3000 AF4000 AFM2000 AFM3000 AFM4000 B210L B310L B410L B210T B310T B410T Y20 Y30 Y40 Y20L Y30L Y40L Y20T Y30T Y40T 5 Spacer Approx. 133 Approx. 172 97.5 3 L bracket 4 T

Compact Cylinder with Air Cushion Series RQ

B + Stroke 4-FD L FT FX FZ A + Stroke Rod end male threads Rear flange type Double clevis type Applicable L1 Double clevis type Rod end nut mm Bore size (mm) Stroke range (mm) Double clevis type/RQD, RDQD A B CL CD CT CU 4-N Cap bolt CT 20 to 100 32 37 64 10 5 14 74 20 to 100 40 44 73 10 6 14 83 CD hole H10 Shaft d9 30 to 100 50 49.5 85.5 14 7 20 99.5 mm Bore size (mm) CW CX CZ L L1 N RR

V100

2 50 78 L1 L2 VFN Common exhaust: VV3Z4-S50 (Built-in One-touch fittings manifold) (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 61.4 R side 2-M5 x 0.8 38 19 PE 2-5.3 mounting hole 4.4 10 2-M5 x 0.8 L side Max.10 91 23 18 (Lead wire length) Manual override (Non-locking) 300 300

MK

4 !5 !6 !7 !8 !

3 Port Solenoid Valve Series VQ100 1

Refer to the manifold dimensions on page 4-12-13 to determine L dimension. Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

3 Port Solenoid Valve Series VQ100 1

Refer to the manifold dimensions on page 4-12-13 to determine L dimension. Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

3 Port Solenoid Valve Series VQ100

Refer to the manifold dimensions on page 4-12-13 to determine L dimension. Blanking plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 L Dimension L = 12.5n + 10.5 Plug lead unit (VV3Q12) for manifold 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No.

VQ

Blank plate with 2 screws and gasket L 12.5 (Pitch) 5.25 7.5 25 35 5.5 1.25 VVQ100-10A-2 Plug lead unit (VV3Q12) for manifold L Size Dimensions L=12.5n+10.5 10 135.5 9 123 8 110.5 7 98 6 85.5 5 73 4 60.5 3 48 2 35.5 1 23 No. L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No.

FSQ seies

l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

Air Cylinder RSQ Series Stopper Cylinder

N l O R RSUIOA32 48 5.5 MOxl 10 G@@-l-qtr-5'i.]

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Super PFA (1) FEP (2) Modified PTFE (3) Applicable tubing material Nylon Polyurethane Soft nylon 4/2.5 3.18/2 4/2.5 M3 Applicable tubing O.D. / I.D. 3.18/2.18 4/2.5 6/4 3.18/2 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 M5, R 1 8 6/4 Line up various types For air connection in confined areas.

Vacuum Gripper

(FKM (Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10

Vacuum gripper

Weight by cup material (g/cup) N NBR S/SF (Silicone U (Urethan F (FKM ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2

Vacuum Gripper

UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2

Vacuum Gripper

(Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10