Valve Single Unit

double With light/surge voltage suppressor SY 3 3 position closed center 4 3 position exhaust center SYJ Electrical entry 5 3 position pressure center Grommet L plug connector M plug connector SX M: With lead wire (Length 300 mm) MN: Without lead wire MO: Without connector L: With lead wire (Length 300 mm) LN: Without lead wire LO: Without connector G: Lead wire length 300 mm H: Lead wire

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

5 Port Solenoid Valve

Polarity L SOL.A SOL.B SOL.A SOL.B () () (+) (+) 1 1 Station 1 Station 1 () () (+) (+) 2 2 SOL.A SOL.B SOL.A SOL.B () () (+) (+) 3 3 Flat Ribbon Cable Connector Assembly (Option) Station 2 Station 2 () () (+) (+) 4 4 SOL.A SOL.B SOL.A SOL.B Cable length (L) Assembly part no. () () (+) (+) 5 5 Station 3 Station 3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 20P AXT100-FC20-1 AXT100-FC20-2

Microspeed Cylinder

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. With the meter-out function, control may not be possible during low speed operation. Caution 1.

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

IDX-OM-W016

IDFA4E to 8E-23-T IDFA11E-23-T GFGI For Option R GFGI For Option R 1 2 3 L N PE 1 2 3 L N PE TB TB MC TDR MC TDR ILS ILS For Option V EVD For Option V MC TDR EVD MC TDR PTC OLR MC PTC OLR MC PE CM PE CM PE FM1 PRS PE FM1 P PRS FM2 PE MC TDR P FM2 PE In FM2, only for DFA6E/8E MC TDR IDFA15E1-23-T Symbol Name Operation Failure L N PE 1 3 2 TB CM Compressor Motor TDR MC FM1,FM2 Fan Motor ILS

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net weight Part no. 5g GR-L-005 10g GR-L-010 150g GR-L-150 14 3-3. Consumables 3-3-1. Replacement parts For replacement parts, refer to the maintenance page for each series. Seals are not in airtight package at the time of delivery. Use them within a year.

V100

) (A) 2 Base Mounted VQZ200 VP (Standard) 12 VDC 24 VDC 1 (P) 3 (R) S070 N.C. 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VQ7 2 position single EVS 0.47 4/2 5/3 Page 3-3-16 Non-locking push type VFN (A/B EA/EB) L plug connector (M) (Standard) 2 position double With surge voltage suppressor (G)(L) (M)(D) With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B

Air Slide Table Series MXP

3 and !4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

single (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure

45

suppressor 3 3 position closed center SY With light/surge voltage suppressor 4 3 position exhaust center 5 3 position pressure center SYJ Rated voltage Electrical entry 5 24 VDC 6 12 VDC SX Grommet L plug connector M plug connector G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) LN: Without lead wire LO: Without connector M: With lead wire (Length

MHF2-E

For guide: GR-S-010 (10g) For cylinder: GR-L-005 (5g) or GR-L-010 (10g) A 14 - 3-4. Construction/Parts list 1 MHF2-8D, MHF2-8D1 Components No. Description Material Note No.

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN Terminal (D): 10-SYJ5 23-D-M5 3 4 5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 54.1[56.3] 44.3[