Table of Contents

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

VDW Series

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

VDW

3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Table of Contents

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

-fl Seies

In case of ptus-in subptare or non ptug-in subptate, and 0.6s tbs., and O.5g tbs. respectvety. St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

In case of ptus-in subptare or non ptug-in subptate, and 0.6s tbs., and O.5g tbs. respectvety. St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 60 or less 5 1.87 (1.82) Closed center VFR530 VFR531 80 or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Manual override Note 3) NIL Non-locking push type B Locking type (Tool required) Semi-standard Note 3) Only the push locking type (no symbol) is available for the latching Note 4) Refer to Table 3 for the accessory. Table 1.

ZB-OM00301

JIS B 8370: JIS B 8361: JIS B 9960-1: -((1 :) JIS B 8433-1993: *2) : : : 1 2. 3. 1. 2. 3. 4. 2 2 - No.ZB-OM00301 3 1 1 *3) 1 1 () () () 3 - No.ZB-OM00301 () () 4 - No.ZB-OM00301 () * JIS B 8392-1 2.4.32.6.3 () 5 - No.ZB-OM00301 * F.G.

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

Compact Vacuum Unit

Note 3) Only the push-locking type (no symbol) is available for the latching type. Note 4) Refer to for the accessories. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

This is a legacy product, and replaced byVK334-5G-01F, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, NA, VK300 BASE MT 1/8, 0.2425 lb

VFS

8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110 600 0.88 45 or less 2 position 3 position VFR 3 8 VP4 Double 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 VFS5200 VFS5210 600 1.06 25 or less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110 VFS5100 1 2 3 4 0.88 Single 600 45 or less 2 position 3 position 3 8 Double VFS5210 VFS5200 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.06 600 25 or less Closed center VFS5310

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

Table of Contents

KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Without check valve Without check valve Male thread type Male thread type Body size Part no.

KJ

KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Without check valve Without check valve Male thread type Male thread type Body size Part no.