VZS M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position
ported) 5.5 F E Manual override 2-6.4 Mounting hole C B A G H 1 Q l = 300 S U V Y (X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x
Stations 02 2 stations IN port direction ... ...
(built-in magnet) Nil S 2 pcs. 1 pc.
NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1 (Prus-in Vps) NWFS2OOCR.3I T-2 (Non plugin type) (Speciry 1/8 (01) or 1/4 (02)) lnterface Sped Control WFSI2
NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1 (Prus-in Vps) NWFS2OOCR.3I T-2 (Non plugin type) (Speciry 1/8 (01) or 1/4 (02)) lnterface Sped Control WFSI2
Subplate {hNPlID: DXr201-2-1TP . Subplat (tlNPIR: DXT201-2-2TP . NW3Z5-40-O2 . NW3Z5-4r -Ol . NW3Z5-41-02 . NW3Z5-41R-Ol .
Subplate {hNPlID: DXr201-2-1TP . Subplat (tlNPIR: DXT201-2-2TP . NW3Z5-40-O2 . NW3Z5-4r -Ol . NW3Z5-41-02 . NW3Z5-41R-Ol .
F: D-sub connector (25 pins) PG: Flat ribbon cable (20 pins) P: Flat ribbon cable (26 pins) Symbol 02 Symbol Stations Note Symbol Stations Note Stations Note 02 02 2 stations 2 stations 2 stations All double wiring All double wiring All double wiring 12 02 09 02 12 02 12 stations 9 stations 12 stations 2 stations 2 stations 2 stations All single wiring All single wiring All single wiring
) (3.6) (3.6) (3.6) (3.6) 2-3.2 (For mounting) 2-3.2 (For mounting) 25 25 25 28 28 28 28 Refer to the page 91 for dimentions with connector cable. 52 Series SYJ7000 2 Position Double [ ]: AC G H G H C6, N7 C8, N9 Grommet (G), (H): SYJ7220-01 Built-in one-touch fitting: SYJ7220G: Approx. 300 H: Approx. 600 (Lead wire length) 107.4 [111.8] 63 3 13 B A B A Manual override 17 35 17 2-3.2 (For
10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.
Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h
(1.5W) (0.5W) Seal M5 thread Low wattage Y (2) H (2) High pressure 0 1 Metal Rubber Note) See Options on p.1.10-67 for inch-size One-touch fittings.
(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +
N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.
VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.
VAC Vacuum pump side Atmosphere 30 AMR 18 50.6 ITV 35 43 2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge
2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port
2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.