Digital Pressure Switch Other parameter settings Item Page Default setting [F 3] Response time page 30 2.5 ms [F 4] Display resolution page 31 1000-split [F 5] Auto-preset function page 32 Manual [F 6] Fine adjustment of display value page 34 0% [F 7] Power saving mode page 35 OFF [F 8] Security code page 36 OFF [F90] Setting of all functions page 37 OFF [F97] Copy function page 39 OFF [F98] Check of output page
() (H_1) () (H1) (H1) (H_1) (H1) (H1) OUT1 OUT2"1""2"() P_1 P_2 -29No.PS-OML0002CN-G [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1
Other parameter settings Item Page Default setting [F 3] Response time page 29 Digital filter:1 s Delay time: 4 ms [F 4] Display resolution page 32 Depends on the specification of the special product [F 5] Auto-preset function page 33 Manual [F 6] Fine adjustment of display value page 35 0% [F 7] Power saving mode page 36 OFF [F 8] Security code page 37 OFF [F 9] Setting of low-cut function
(Refer to Copy function on page 10.) 5 Series ZSE30A(F)/ISE30A Dimensions Z/ISE30A(F) Piping 01 N01 / 25 8 9.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector M5 x 0.8 10 200.1 30 01: R1/8 N01: NPT1/8 1.5 Width across flats 12 C4H C6H N7H One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight 17.95 21.75 17.55 10.3 9.8 14
. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less 24 or more Multiple (2 pcs. or more) vertical mounting 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 40 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch The F in ( ) shows the function code number.
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Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
'i,-.1-)^' l z N F Noz l!
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock
Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock
fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch
N femals 1/4 NPT NOTE: 1.
Example) G36-P4-01-X30 ISA2 ISA2 2 Port Solenoid Valve Regulator PSE VCA27A S 5 DL 02 4 Q AR 20 02 1 B IS Port size Voltage CE compliant 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Thread type ISG 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Nil N F Rc NPT G ZSM1 Throttle Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock and throttle Semi-standard
Series: 350 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)
Series: 350 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -
Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7
. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5