4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

regulator) Blanking plate (Pressure switch) 10 Note) 10 stations Required stations 2 stations 1 station Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

V100

actuation Port size {2(A) port} (A) 2 N.C.

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Compact Vacuum Unit

Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

This is a legacy product, and replaced byVK334-5G-01F, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, NA, VK300 BASE MT 1/8, 0.2425 lb

VFS

, 01T, 10: 2 to 15 stations 01C, 01F: 2 to 8 stations Blanking plate (Filter, Regulator) Blanking plate (Pressure switch) Stacking type Integrated type Nil 1 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 Symbol Note) Stacking type: Base type 01, 01T Integrated type: Base type 01T, 01C, 01F Passage Porting specifications B, A EA, EB P Thread type Symbol Nil N

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

U side mounting Stations 02 2 stations Symbol Porting specifications (A, B) Passage EA, EB P Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 10 10 stations Symbol Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common How to Order Manifold Assembly [Example] Option Add the valve and option part numbers in order

VFR

U 01C, 01F U side mounting Symbol Stations 02 Passage Porting specifications (A, B) EA, EB P 2 stations Symbol 10 Note) 10 stations 1 Side 2 Bottom Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Common Common Option How to Order Manifold Assembly Plug-in type with terminal block (6 stations) Non plug-in type: 6 stations VV5FR4-10-061-03-CU 1

Table of Contents

KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water

KJ

KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: F (G)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: G, Material: -, Option: -, CE Compliance: -

S Couplers Series KK/KKH/KK13

KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 1/8 1/8 1/4 1/4 1/2 1/2 With check valve 3/4 3/4 1 1 Without

S Couplers

KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/2 Rc 3/4 Rc 1 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 Rc 1 1/4 Rc 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check

S Couplers

Female thread type Female thread type Model Port size Model Port size KK130P-01F -02F -03F -04F -N01F -N02F -N03F -N04F KK130S-01F -02F -03F -04F -N01F -N02F -N03F -N04F Rc1/8 Rc1/8 Rc1/4 Rc1/4 Rc3/8 Rc3/8 Rc1/2 Rc1/2 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 NPT1/2 NPT1/2 Refer to the how to order on page 1 for the sleeve lock mechanism provided type.

Proposals for Energy Saving

KK3P-01F KK4P-02F -03F KK6P-03F -04F 1/8 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1/2 KK3S-01F KK4S-02F -03F KK6S-03F -04F 1/4 1/4 1/2 1/2 Nut fitting type (for fiber reinforced urethane hose) Nut fitting type (for fiber reinforced urethane hose) Body size Applicable hose I.D./O.D. mm Part no. Body size Applicable hose I.D.