NVZseies

o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold. Pnryer Combinatiorw of tulenoidVahrc.

3 Way,3 Port Solenoid Valve NVZ Series

o"oo 2 stations Top ported NW4Z1-20-91 F: With mounting 20 stations lfthe.e ale fiors lhan 10 stdions, xhaust from both sides of lnanilold. Pnryer Combinatiorw of tulenoidVahrc.

Table of Contents

EXH port M5 x 0.8 EVS 1 8 ( ): Rc VFN 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor

VZS

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

-fl Seies

Grfimet tefiiM Series NVFR3000: Base Mounted TlPe How to Order F-Through base --G {wa NWq qT.)" r Not ariailable ioi'ottom portea (gee pg. 28lor inclividual subpla'tes) NtvFR3(1) 0 (0x x3) F 2 posifon single Option -= Non-locking push type 2 position double 2 xA Non-locking 3 posrtion closed center D OIN Coonector & W 3 3 pooition exhausi cenlel 4 3 po6ilion tressue cenler 1 Non plug-in i

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Grfimet tefiiM Series NVFR3000: Base Mounted TlPe How to Order F-Through base --G {wa NWq qT.)" r Not ariailable ioi'ottom portea (gee pg. 28lor inclividual subpla'tes) NtvFR3(1) 0 (0x x3) F 2 posifon single Option -= Non-locking push type 2 position double 2 xA Non-locking 3 posrtion closed center D OIN Coonector & W 3 3 pooition exhausi cenlel 4 3 po6ilion tressue cenler 1 Non plug-in

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

Title not found

'i,-.1-)^' l z N F Noz l!

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

VQ5000

Note 2) Splash proof specification is not available for F and T1.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 2) Splash proof specification is not available for F and T1.

1

SY53 0 1-1--W-V02 (Top ported) Plug F (Max. 3) For "F" marking (Thread type) 01> 26.8 14.5 4A X 2B PE F B A A 4 B 2 3EB 1P 5EA 1/8 (For threaded type) [4(A), 2(B) port] (16.2) (For threaded type) 25.9 One-touch fitting [4(A), 2(B) port] (For threaded type) Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (For 01 threaded type) (76.7) (62.3) INDEX Note 2) These figures show the SY5230-

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 101 Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 (Lead wire length) 18.5 42.6 [49.6] Approx. 300 Pg7 91.9 [94.1] 101.9 82.1 [84.3] 91 83.6 77.1 61.1 35 35 35 35 28.3 28.3 28.3 28.3 21 21 21 2-3.2 (For mounting) 25 21 2-3.2 (For mounting

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(For mounting) 23 2-2.6 (For mounting) 23 23 23 2-2.6 2-2.6 (For mounting) 60.6 (For mounting) 27 Refer to the page 91 for dimentions with connector cable. 30 Series SYJ5000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ5140-01 Built-in speed controller: SYJ5150-01 Max. 13.5 19.4 10.3 1/8 (A, B port) 11.5 17 8.5 2-4.3 (For mounting) 37.5 4 Manual override With interface regulator

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)

Vacuum Unit

C C1 L L1 L2 L3 W Y Y1 N L Individual wiring V V V V V F D-sub connector V V P Flat ribbon cable connector V V N No wiring (No valve) V V V 1 Combination of direct exhaust and end plate exhaust from each station 2 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.