Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 2 x 5.6 mounting hole Rc 1/8 external pilot port (Only for external pilot) 2(B), 4(A) port (PE port) Pilot valve manual override Light window At FZ 2 x 5.6 mounting hole With direct manual override G 1/2 electrical entry Bottom ported 1 4 ( ): Rc 3 position double check: VFS3600-F 2 position double: VFS3200-F 3 position closed center: VFS3300-F 3 position exhaust center: VFS3400-F 3 position

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

EXxx-OMZ0016

(16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points) 32 32 *1: User

Compact Vacuum Unit

With lead wire with connector (Lead wire length: 78.7 inch (2 m)) 0.0 to 14.6 psi (0.0 to 101.0 kPa) 14.5 to 14.5 psi (100.0 to 100 kPa) G E KJ C1 H 04 F Body type Port size H L 02 04 01 03 2 mm one-touch fitting 4 mm one-touch fitting 1/8" one-touch fitting 5/32" one-touch fitting Straight Elbow Metric size Inch size Output specifications A B NPN open collector 2 outputs PNP open collector

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

CATALOG VC10

HOLES #6-32 UNC THD x .23 (5.8) DEEP 2 PLACES AS SHOWN. .50 30 microns or less. .75 (19.1) DIA. Valve Temperature Range: Standard Valves 5F ( 15C) to 122 F (50 C) ambient; media.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125

LEC-OM07605CN

D 4 DB 16.E 5 DB 16.F 6 DB 8 2 8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

(n+2).E RY(n+2).E RX(n+2).F RY(n+2).F RX(n+3).0 Digital input 0 (CN0, pin.2) RY(n+2).0 RX(n+3).1 Digital input 1 (CN1, pin.2) RY(n+2).1 Rserve RX(n+3).2 Digital input 2 (CN2, pin.2) RY(n+2).2 RX(n+3).3 Digital input 3 (CN3, pin.2) RY(n+2).3 RX(n+3).4 Digital input 4 (CN0, pin.4) RY(n+2).4 Digital output 0 (CN0, pin.4) RX(n+3).5 Digital input 5 (CN1, pin.4) RY(n+2).5 Digital output 1 (CN1,

LEC-OM02904

PB35 0.00 PB36 0.00 PB37 100 PB38 0.0 PB39 0.0 PB40 0.0 PB41 1125 PB42 1125 PB43 0004h PB44 0.0 PB45 CNHF 2 2 0h (1) 0 22 2(2) [Hz] [Hz] 0 1 2250 5F 4.5 2 (2) 0 -40.0dB F -0.6dB 1. C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -