3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

18 18 13.5 SMC 9 (Rc(PT)1/4) (Rc(PT)1/4) 9 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 (Not applicable to standard.)

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: J (Stainless Steel Body, EPDM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, EPDM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

close type Electrical entry How to Order Valve Manifold Ass'y Pilot valve specifications F : Plug-in type With indicator light and surge voltage suppressor (Only for plug-in manifold) Y U L** N 1W (Std.)* 0.5W (Low power) Large flow capacity 1W (Latching coil, + com) Coil voltage 24VDC 12VDC 110VAC 1W (Latching coil, com 5 6 3 Indicator light and surge voltage suppressor 1 2 3 Stations

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

One-touch fittings for 4 M3 X 0.5 External pilot port (Only external pilot style(R)) VK C6: One-touch fittings for 6 M5: M5 thread VZ VF (C4, C6) (54.5) 16.6 25 10 VFR 30 VP7 (M5) 2.5 20 VP4 33.2 23.2 Mounting holes 10.8 10.8 2-PE port 22.2 Die cast hole For manifold gasket positioning 2 2 VQ 1 5 P 3 (54.5) 2-G(PF)1/16 R port VQ4 Rc(PT)1/8 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ222

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

New

2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port size A B B1 C D E F voltage

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

VQZ1000/2000/3000

port F G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

ZQ

1) The above dimensions are for ZQ11U-K2 L-F.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Compact Vacuum Unit Ejector/ Vacuum Pump System

2001 (JIS B8392-1:2003).

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(5/32) N7T (1/4) M5 (M5 thread) 2 stations: 68 Addition per 1 station: 20 1/8 NPTF Top VQZ2 2 VQZ200 2 to 20 stations VV3QZ22N7T (1/4) N9T 5/16) N11T (3/8) 1/4 NPTF 2 stations: 114 Addtion per 1 station: 37 1/4 NPTF Top VQZ3 2 VQZ300 2 to 20 stations VV3QZ32How to Order / Manifold Assembly (Example) D side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: J (Stainless Steel Body, EPDM Seal, Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, EPDM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked

Base Mounted Metal Seal/Rubber Seal Series VQ

P (1) U S P kit J kit F kit w AXT100-1-J 20 (1) U S U S VQZ AXT100-1-F (1) e Note 1) Top (vertical) entry connector for FU, PU and JU while side (horizontal) entry connector for FS, JS and PS.

Table of Contents

mounting screw M5 x 0.8 x 16 l 1.