Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: (None), Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: B (ANB1-01, 55 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: (None), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: S (Screw Mounting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: (None), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: K (AKH06-00, for 6mm tubing), Exhaust Solenoid Valve: V (V124-5LU-M5)

Controller Mounting: D (DIN Rail Mouting), Cable Length: 1 (1 m), Inlet Port Silencer: A (AN10-01, 62 dB), Digital Pressure Switch: P (ISE20A-Y-01-J-X603), Exhaust Check Valve: (None), Exhaust Solenoid Valve: V (V124-5LU-M5)

ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Hydraulic

Example: M5 x 50l 4pcs.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61