High Vacuum Angle Valve Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed Technologies, Inc.
JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.
JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 128 3 4M40.7 8 3.4 8 2 11 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% 0.4 (W) [0.40.1] P .1367 LED 300 12 - 4-3.
JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.
V114-5LU Electrical entry L shaped plug connector (L) Coil rated voltage [V] 24 Allowable voltage fluctuation -10 to 10% Power consumption [W] 0.4 [Starting 0.4,Holding 0.1] Surge voltage suppressor Please refer to page 1367 of the Best Pneumatics catalogue. Indicator LED LED 14 - 4-3.
V114-5LU Electrical entry L shaped plug connector (L) Coil rated voltage [V] 24 Allowable voltage fluctuation -10 to 10% Power consumption [W] 0.4 [Starting 0.4,Holding 0.1] Surge voltage suppressor Please refer to page 1367 of the Best Pneumatics catalogue. Indicator LED LED 14 - 4-3.
V114-5LU Electrical entry L shaped plug connector (L) Coil rated voltage [V] 24 Allowable voltage fluctuation -10 to 10% Power consumption [W] 0.4 [Starting 0.4,Holding 0.1] Surge voltage suppressor Please refer to page 1367 of the Best Pneumatics catalogue. Indicator LED LED 14 - 4-3.
V114-5LU Electrical entry L shaped plug connector (L) Coil rated voltage [V] 24 Allowable voltage fluctuation -10 to 10% Power consumption [W] 0.4 [Starting 0.4,Holding 0.1] Surge voltage suppressor Please refer to page 1367 of the Best Pneumatics catalogue. Indicator LED LED 14 - 4-3.
When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -55- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.
Q172DSCPUQ173DSCPUQD77MS_ FLS: RLS: DOG:dog 15. EM2 16.
Do not supply 24 VDC power supply continuously to the [BK RLS (Lock release)] terminal. Stop supplying 24 VDC power supply to the [BK RLS (Lock release) terminal during normal operation. If power is supplied to the [BK RLS] terminal continuously, the lock will be released, and workpieces may be dropped when the stop signal (EMG) is received. 9.
Do not supply 24 VDC power supply continuously to the [BK RLS (Lock release)] terminal. Stop supplying 24 VDC power supply to the [BK RLS (Lock release) terminal during normal operation. If power is supplied to the [BK RLS] terminal continuously, the lock will be released, and workpieces may be dropped when the stop signal (EMG) is received. 9.
If the product is operated without releasing the lock, wearing of the lock sliding surface will be accelerated, causing reduction in the holding force and the life of the locking mechanism. (8) Do not supply 24VDC power supply constantly to the [BK RLS (Lock release)] terminal. Stop supplying 24VDC power supply to the [BK RLS (Lock release)] terminal during normal operation.
2ON 3, 4 51015 10 1% 6 7LCD 8FG 19 - No.ZQ-OM01401-B 6. 6.1 ON () () 6.2 1 2(0.4N m ) 315 30 (0.06~0.10 Nm) 20 - No.ZQ-OM01401-B 7 , 7.1 () 1 PBT 2 ,Assy POM, 3 PBT 4 PBT 5 6 (PET) P.25 3 7 HNBR P.25 6 8 SUS 9 10 PC P.25 4 11 SUS 12 PVA P.25 5 13 P.2223 1 14 PBT 15 P.2425 2 16 (V) P.25 7 17 Ass'y P.25 9 O HNBR,NBR 21 - No.ZQ-OM01401-B 7.2 1 N.C., ZQ1-V114
Motor (Servo/24 VDC) Lock release (+) Input (+) for releasing the lock Black BK RLS Wiring Example 2 Parallel I/O Connector: CN4 When you connect a PLC, etc., to the CN4 parallel I/O connector, use the I/O cable (LEC-CK4-).
[Contents] q Communication cable w USB cable e Controller setting software * A conversion cable (P5062-5) is not required. 1 C24V 4 0V 6 5 4 JXC W2 2 M24V 5 N.C. 3 2 1 3 EMG 6 LK RLS Contents Power supply plug A kit includes: Terminal name Function Details Communication cable, USB cable, Controller setting software Nil 0V Common supply () M24V terminal/C24V terminal/EMG terminal/ LK RLS terminal
7.6 14 - (SVRE OFF )[BK RLS]DC24V [BK RLS] BK RLSDC24V BK RLS (EMG) /(LEC ) 8. 8.1 / ! L H L H L H 15 - 1020 /2 713 3 () 30%(F.S.) 25%(F.S.) 20%(F.S.) LEHZ(J) 10,16 20,25 32,40 LEHF 10 20 32,40 LEHS 10 20 32,40 / () 8.2 !
EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 23 - 7.CN3 1 1 DA CC-Link A 2 2 DB CC-Link B 3 3 DG CC-Link 4 4 SLD CC-Link 5 5 FG CC-Link CC-Link CC-Link 1105%, 1/2W CC-Link 1305%, 1/2W 24 - 8.CN1IF (CONT) 8.1 (LEC)12 LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c
M 24V 0V 0V (2) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (LEC)OFF 22 - 7.CN3 1 2 3 4 5 TM() 1 VDeviceNet 2 CAN_L CAN(L) 3 SHIELD 4 CAN_H CAN(H) TM() 5 V+ DeviceNet DeviceNet TMCAN_HCAN_L 1201% 1/4W 23 - 8.CN1IF(CONT) 8.1 (LEC)8 LEC-CG1-1LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD LEC-CGD LEC-CGR c) M12 4pin LEC-CG1b) M12 4pin b) M12 4pin
EMG Ry C 24V 24V M 24V 0V 0V (2 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V (3 ) BK RLS EMG Ry C 24V 24V M 24V 0V 0V LECOFF 25 - 7CN3: 1 5 4 3 2 1 2 5 4 3 2 1 9 8 7 6 9 8 7 6 3 RXDTXD-P / 4 5 DGND 6 VP 7 8 RXD/TXD-N / 9 PRODIBUS DP 6GK1 500-0FC106ES7 972-0BA12-0XA0 PROFIBUS DP 26 - 8CN1:IF CONT 81 5 (LEC) LEC-CG1-1 LEC-CG2-1 LEC-CG2b) M12 4pin b) M12 4pin LEC-CGD